Semiconductor Device and Method for Manufacturing the Same

ABSTRACT

A configuration of a lateral transistor suited for the hybrid-integration (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor, and a method for manufacturing the lateral transistor are provided. A semiconductor device includes a HCBT  100  and a CMOS transistor  200  hybrid-integrated therein. The HCBT  100  has an open region  21  opened by etching a device isolating oxide film  6  surrounding an n-hill layer  11,  an emitter electrode  31 A and a collector electrode  31 B each of which is formed in the open region  21  and is composed of a polysilicon film having such a thickness as to expose the n-hill layer  11  exposed by etching the device isolating oxide film, and an ultrathin oxide film  24  covering at least a part of the n-hill layer  11.  The ultrathin oxide film  24  functions as a protective film for protecting the n-hill layer  11  from being etched when the polysilicon film is etched to form the emitter electrode  31 A and the collector electrode  31 B.

TECHNICAL FIELD

The present invention relates to a semiconductor device and a method formanufacturing the semiconductor device. More particularly, the inventionrelates to a semiconductor device having a BiCMOS transistorconfiguration in which a CMOS transistor and a bipolar transistor aremounted, and to a method for manufacturing the semiconductor device.

BACKGROUND ART

Currently, remarkable progress is being made in technologies related toradio communication, and active research and development efforts arebeing made of small-sized ICs (Integrated Circuit) to be used in mobilephones. As one of ICs to be used mainly for mobile phones, asystem-on-chip, in which an RF (Radio Frequency) circuit and a basebandcircuit are mounted together on a single chip (hereinafter also referredto as hybrid integration) is now a focus of attention.

High-speed operation is needed for the RF circuit of the system-on-chip,and, miniaturization is also needed for the structure thereof. On theother hand, unlike the RF circuit, the baseband circuit need not beminiaturized. As is generally known, advanced miniaturization technologymay lead to the problem that the cost of manufacture increases and theyield of manufacture decreases.

Incidentally, as is well known, transistors including an IC include aCMOS (Complementary MOS) transistor and a bipolar transistor. Since thegate voltage of the CMOS transistor is a low and the process stepsthereof are easy to perform, the CMOS transistor is applied as anelement of many types of ICs. On the other hand, the bipolar transistoris known to be more advantageous for high-speed operation than the CMOStransistor. Comparison between a bipolar transistor and a CMOStransistor both having the same microstructure shows that the bipolartransistor can achieve operating speed as high as that of a CMOStransistor of one or two generations ahead.

In consideration of the above-described viewpoint, it is desirable thatthe RF circuit of a system-on-chip should be composed of bipolartransistors advantageous for high-speed operation and the basebandcircuit of the system-on-chip is composed of easy-to-manufacture CMOStransistors. A transistor which includes a bipolar transistor and a CMOStransistor will hereinafter be referred to as a BiCMOS transistor.

Bipolar transistors are classified into vertical transistors and lateraltransistors. In a vertical bipolar transistor, carriers flow from anemitter in a vertical direction and reach a collector. Since a collectorregion is formed in a position deep from a wafer surface, anemitter-collector resistance increases, thus making the transistordisadvantageous for high-speed operation. In addition, the transistorrequires a high-concentration buried layer, a collector epitaxial layer,a deep trench isolation, and the like. Consequently, the number ofprocess steps increases, thus increasing costs to increase.

Meanwhile, the lateral bipolar transistor is simpler in structure thanthe vertical bipolar transistor. In addition, a BiCMOS transistor can becomposed by adding a relatively small number of process steps to that ofa CMOS transistor. Furthermore, since a collector electrode can bedirectly brought into contact with a collector region, the lateralbipolar transistor is also advantageous for high-speed operation.Accordingly, in the BiCMOS transistor, it is desirable to apply thelateral bipolar transistor in which carries flow in a lateral direction.

A lateral bipolar transistor is described in, for example, US2005/0040495 A1 (hereinafter also referred to as Patent Document 1). Thelateral NPN transistor described in Patent Document 1 is a transistorcalled a Horizontal Current Bipolar Transistor (HCBT).

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

The HCBT described in the aforementioned Patent Document 1, however, isnot assumed to be applied to a BiCMOS transistor in combination with aCMOS transistor. Accordingly, if the HCBT and the CMOS transistor arehybrid-integrated to form a BiCMOS transistor, such process problems asdescribed below will arise.

FIG. 49 is a cross-sectional view of the HCBT described in PatentDocument 1. The HCBT illustrated in FIG. 49 includes a collectorelectrode 77, a base electrode 78, and an emitter electrode 79. In anactive region (herein, referred to as n-hill layer) 81 of the HCBT, anintrinsic base layer 88 is formed first, and then an extrinsic baselayer 89 for external contact is formed.

FIGS. 50A to 50F are process drawings used to explain the process of theHCBT illustrated in FIG. 49. In a process of forming the HCBT alone inorder to first form a shallow trench isolation, an Si nitride film 83 isformed on an ion-implanted Si substrate and then etched to form ann-hill layer 81, as illustrated in FIG. 50A. Then, as illustrated inFIG. 50B, a CVD (Chemical Vapor Deposition) oxide film is formed overthe entire surface of the HCBT from above the Si nitride film 83 etchedalong with the Si substrate. After CMP (Chemical Mechanical Polishing)is performed, the entire surface is wet-etched. As a result of the wetetching, an oxide film 90 remains as illustrated in FIG. 5C, therebyforming the shallow trench isolation. After the formation of the shallowtrench isolation, ions are implanted into side surfaces of the n-hilllayer 81 to form the intrinsic base layer 88. In addition, asillustrated in FIG. 50D, ions are implanted from above the Si nitridefilm 83 to form the extrinsic base layer 89.

Next, a doped polysilicon film is formed and etched. In this step, asillustrated in FIG. 50E, an N+ polysilicon film 92 relatively high inimpurity concentration is formed on the n-hill layer 81 and an undopedpolysilicon film 93 is formed on the N+ polysilicon film 92. Next, theundoped polysilicon film 93 and the N+ polysilicon film 92 are etchedback by etching or by a combination of CMP and etching. At this time,the n-hill layer 81 is covered with the Si nitride film 83 and is,therefore, protected from the etching. As a result, doped polysilicons76 a and 76 b illustrated in FIG. 50F remain around the n-hill layer 81.

However, an etchant (20% tetramethylammonium hydroxide solution, whichis hereinafter referred to as “TMAH solution”) used in theaforementioned etching does not provide any sufficient selection ratiobetween the n-hill layer 81 and the doped polysilicons 76 a and 76 b.For this reason, in Patent Document 1, the Si nitride film 83 formedbeforehand on the n-hill layer 81 serves as an etching mask for thedoped polysilicons 76 a and 76 b.

Incidentally, when the HCBT is hybrid-integrated together with a CMOStransistor, the width of a base region of the HCBT needs to be reducedas much as possible. It is therefore essential to avoid the effects ofheat treatment at the time of forming a CMOS. Thus, the HCBT isdesirably formed later than the formation of the CMOS transistor.

When the CMOS transistor is formed prior to the formation of the HCBT,elements are isolated by the above-described step for the shallow trenchisolation, and the CMOS transistor is first formed. However, a screeningoxide film is generally formed on the Si substrate at the time offorming the CMOS transistor, in order to prevent channeling during ionimplantation. In addition, the Si nitride film 83 is a mask for theformation of the shallow trench isolation and is, therefore, not uniformin thickness. Thus, the Si nitride film 83 cannot be used to preventchanneling in ion implantation. This means that the Si nitride film 83has to be removed prior to the ion implantation of the CMOS transistor,in order to hybrid-integrate the CMOS transistor. This is because it isdifficult to selectively dry-etch the Si nitride film 83 and the film istherefore generally removed by overall wet etching using hot phosphoricacid.

However, if the doped polysilicons 76 a and 76 b are etched with the Sinitride film 83 removed, there is a risk of even the n-hill layer 81being etched due to the aforementioned selection ratio problem. FIG. 51illustrates an etched state of the n-hill layer 81.

Furthermore, in Patent Document 1, the extrinsic base layer 89 of theHCBT is formed subsequently to the formation of the intrinsic base layer88. Such a process may cause a problem that impurities implanted intothe extrinsic base layer 89 may affect the profile of the intrinsic baselayer 88.

In addition, a wafer of (110) plane is used in this process and theintrinsic base layer is protected by a spacer formed of a (111) planewhen a polysilicon is etched using TMAH. There remains a problem,however, that it is difficult for the wafer of (110) plane to be sharedwith a bulk CMOS.

Such a problem is a specific example of several problems when a lateralbipolar transistor (HCBT) having a particular structure and a transistorformed by a CMOS process are hybrid-integrated. The present invention isintended to provide a semiconductor device capable of separately dealingwith each of such several problems, and a method for manufacturing thesemiconductor device.

Means for Solving the Problems

In order to solve the aforementioned problems, a semiconductor deviceaccording to an aspect of the present invention includes a lateralbipolar transistor and a CMOS transistor hybrid-integrated therein, thelateral bipolar transistor including: an open region opened in a deviceisolating oxide film surrounding an active region; a polysilicon filmformed on the open region; and a protective film covering at least apart of a peripheral surface of the active region exposed by opening theopen region in the device isolating oxide film, wherein the polysiliconfilm has such a thickness as to expose the active region out of thepolysilicon film, and the protective film is a film for preventing theactive region from being etched when the polysilicon film is etched tothe thickness.

In addition, a semiconductor device according to another aspect of thepresent invention includes a lateral bipolar transistor and a CMOStransistor hybrid-integrated therein, the lateral bipolar transistorincluding: an open region opened in a device isolating oxide filmsurrounding an active region; a polysilicon film formed on the openregion; a protective film covering at least a part of a peripheralsurface of the active region exposed by opening the open region in thedevice isolating oxide film; a collector diffusion layer formed in theactive region; and a collector electrode directly connected to thecollector diffusion layer region, wherein the polysilicon film has sucha thickness as to expose the active region out of the polysilicon film,and the protective film is a film for preventing the active region frombeing etched when the polysilicon film is etched to the thickness.

In addition, a semiconductor device according to yet another aspect ofthe present invention includes a lateral bipolar transistor, the lateralbipolar transistor including: a substrate including a first conductivelayer; an active region located on the first conductive layer and havingsuch a shape as to protrude from the first conductive layer and have anupper surface and at least one side surface in contact with the uppersurface; an open region opened in a device isolating oxide filmsurrounding the active region; a polysilicon film formed on the openregion; an emitter region solid-phase diffused from the polysiliconfilm; and a dummy gate polysilicon formed in the device isolating oxidefilm, wherein the shape of the emitter region solid-phase diffused fromthe polysilicon film is controlled by the dummy gate polysilicon.

In addition, a semiconductor device according to further another aspectof the present invention includes a lateral bipolar transistor, thelateral bipolar transistor including: a substrate including a firstconductive layer; an active region located on the first conductive layerand having such a shape as to protrude from the first conductive layerand have an upper surface and at least one side surface in contact withthe upper surface; and a device isolating oxide film partially coveringthe side surface of the active region, wherein the active regionincludes a second conductive layer having a polarity different from thatof the first conductive layer, and the active region further includes athird conductive layer having the same polarity as that of the firstconductive layer in the upper surface and in two opposed positions ofthe at least one side surface.

In the above semiconductor device, the third conductive layer includes afourth conductive layer having the same polarity as that of the secondconductive layer.

In the above semiconductor device, the fourth conductive layer isconnected to an emitter electrode.

In the above semiconductor device a, the semiconductor device furtherincludes a contact electrode and the active region is electricallyconnected to the contact electrode.

In the above semiconductor device, the semiconductor device furtherincludes at least two contact electrodes and the active region iselectrically connected to the contact electrodes.

In the above semiconductor device, the impurity concentration and widthof the active region are set so that the active region as a wholebecomes depleted when the lateral bipolar transistor is electricallyenabled.

In the above semiconductor device, a ratio between the impurityconcentration of the active region and the impurity concentration of thethird conductive layer is within a range of 1:10 to 1:10000.

In the above semiconductor device, further includes a CMOS transistorintegrated on the substrate.

A method for manufacturing a semiconductor device, according to furtheranother aspect of the present invention, in which a lateral bipolartransistor and a CMOS transistor are hybrid-integrated, the methodincluding the steps of: forming an extrinsic base region for externallyconnecting the base region of the active region of the lateral bipolartransistor, following a step of at least one time of ion implantation inwhich an impurity is implanted with the gate electrode of the CMOStransistor used as a mask; forming an open region around the activeregion by removing a predetermined portion of the device isolating oxidefilm surrounding the active region; forming an intrinsic base region ofthe lateral bipolar transistor by implanting ions in a region of a sidesurface of the active region exposed by the formation of the open regionpartially overlapping with the extrinsic base region; forming aprotective film for protecting the active region during etching in asubsequent step on a surface of the active region; forming animpurity-containing polysilicon film in a region including the activeregion in which the protective film is formed and the open region in theprotective film formation step; etching away the polysilicon film by apredetermined thickness; and forming an emitter diffusion layer regionand a collector diffusion layer region by solid-phase diffusing animpurity from the impurity-containing polysilicon film left afteretching in the polysilicon etching step.

In the above method for manufacturing a semiconductor device, accordingto further another aspect of the present invention, the protective filmis an oxide film having such a thickness as to prevent the active regionof the lateral bipolar transistor from being etched in the polysiliconetching step.

A method for manufacturing a semiconductor device, according to furtheranother aspect of the present invention, in which a lateral bipolartransistor and a CMOS transistor are hybrid-integrated, the methodincluding the steps of: forming an extrinsic base region for externallyconnecting the base region of the active region of the lateral bipolartransistor, following a step of at least one time of conductive filmformation in which an impurity is implanted with the gate electrode ofthe CMOS transistor used as a mask; forming an open region around theactive region by removing a predetermined portion of the deviceisolating oxide film surrounding the active region; forming an intrinsicbase region of the lateral bipolar transistor by implanting ions in aregion of a side surface of the active region exposed by the formationof the open region partially overlapping with the extrinsic base region;forming a protective film for protecting the active region duringetching in a subsequent step on a surface of the active region; formingan impurity-containing polysilicon film in a region including the activeregion in which the protective film is formed and the open region in theprotective film formation step; etching away the polysilicon film by apredetermined thickness; forming an emitter diffusion layer region bysolid-phase diffusing an impurity from the impurity-containingpolysilicon film left after etching in the polysilicon etching step;forming an collector diffusion region in the active layer; and formingan electrode directly connected to the collector diffusion region.

In the above method for manufacturing a semiconductor device according,the protective film is an oxide film having such a thickness as toprevent the active region of the lateral bipolar transistor from beingetched in the polysilicon etching step.

A method for manufacturing a semiconductor device including a lateralbipolar transistor, according to further another aspect of the presentinvention, wherein a step of manufacturing the lateral bipolartransistor includes the steps of: forming an active region having such ashape as to protrude from the first conductive layer and have an uppersurface and at least one side surface in contact with the upper surfaceon a first conductive layer serving as a substrate; opening an openregion in the device isolating oxide film surrounding the active region;forming a polysilicon film on the open region; forming an emitter regionby solid-phase diffusing the emitter region from the polysilicon film;and forming a dummy gate polysilicon in the device isolating oxide film,wherein the shape of the emitter region solid-phase diffused from thepolysilicon film is controlled by the dummy gate polysilicon.

Advantages of the Invention

According to the invention as described above, the semiconductor deviceincludes the protective film for preventing the active region from beingetched at the time of etching the polysilicon film. Consequently, evenif the polysilicon film is etched until the active region becomesexposed, the active region is not etched. Therefore, it is possible toenhance the reliability of the characteristics of the semiconductordevice having a BiCMOS transistor structure. It is also possible toincrease the yield of manufacture, thereby contributing to reducingmanufacturing costs.

According to the invention as described above, only the polysilicon filmis etched when the polysilicon film is etched. Thus, the protective filmmakes it possible to prevent the active region from being etched.Accordingly, it is possible to improve the reliability of thesemiconductor device having a BiCMOS transistor structure. In addition,it is possible to reduce manufacturing costs since any extra costs arenot necessary. Furthermore, it is possible to mitigate damage to becaused to the lateral bipolar transistor by heat treatment performed atthe time of forming the CMOS transistor. Still furthermore, according tothe invention as described above, it is possible further to form thecollector region directly in the active region over a wide range. Thus,it is possible to improve high-frequency characteristics.

According to the invention as described above, it is possible to controlthe shape of the emitter polysilicon. Consequently, it is possible toprevent any nonuniformity from arising as a result of planarizing asurface of emitter polysilicon. Thus, it is possible to obtain excellentcontact with the emitter polysilicon. In addition, it is possible tosecure a correct distance between the emitter region formed by thesolid-phase diffusion of an n-type impurity from the polysilicon and theextrinsic base layer. Thus, it is possible to improve electricalcharacteristics.

According to the invention as described above, a depletion regionextends from the upper and side surfaces of the active region. Thisdepletion region further extends depending on a voltage applied. Adepletion layer extending from an opposite side coalesces with the uppersurface to form a collector region depleted sufficiently enough torestrict an electric field. This makes it possible to increase anemitter-collector breakdown voltage.

In addition, according to the invention as described above, a step offorming the intrinsic base region vulnerable to heat, among the steps ofmanufacturing the lateral bipolar transistor, can be carried outsubsequently to at least one-time ion implantation into the CMOStransistor. Accordingly, in the BiCMOS transistor, it is possible tomitigate the degree to which the lateral bipolar transistor may beaffected by heat treatment performed after ion implantation in themanufacture of the CMOS transistor.

In addition, the intrinsic base region can be formed by forming theextrinsic base region to serve as an extrinsic base layer, forming theopen region to expose a side surface of the active region, andimplanting ions into the side surface. By doing so, it is possible toimplant only ions into the upper surface of the active region at thetime of ion implantation performed for the extrinsic base region.Accordingly, it is possible to alleviate effects exerted by a profile ofions implanted into the front surface of the active region on ionsimplanted into the side surface.

Furthermore, the protective film is formed beforehand on a surface ofthe active region to etch the impurity-containing polysilicon filmformed on the active region. Consequently, it is possible to prevent theactive region from being etched also at the time of etching thepolysilicon film. Thus, it is possible to form a lateral bipolartransistor in which correct characteristics are available.

In addition, according to the invention as described above, a highselection ratio is obtainable between the impurity-diffused polysiliconand the active region which is impurity-implanted silicon. Thus, it ispossible to adopt a relatively easy-to-form oxide film as the protectivefilm.

According to the invention as described above, only the polysilicon filmis etched when the polysilicon film is etched. Thus, the protective filmmakes it possible to prevent the active region from being etched.Accordingly, it is possible to improve the reliability of thesemiconductor device having a BiCMOS transistor structure. In addition,it is possible to reduce manufacturing costs since any extra costs arenot necessary. Furthermore, it is possible to mitigate damage to becaused to the lateral bipolar transistor by heat treatment performed atthe time of forming the CMOS transistor. Also according to the inventionas described above, it is possible further to form the collector regiondirectly in the active region over a wide range. Thus, it is possible toimprove high-frequency characteristics.

In addition, according to the invention as described above, it ispossible to use an oxide film appropriate for the protective film.

In addition, according to the invention as described above, it ispossible to control the shape of the emitter region by the presence ofthe dummy gate polysilicon. Thus, it is possible to obtain excellentelectrical characteristics.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view of a semiconductor device according to a firstembodiment of the present invention, depicting a state in which alateral bipolar transistor and a CMOS transistor are hybrid-integrated

FIGS. 2A and 2B are cross-sectional views depicting a configuration ofthe semiconductor device according to the first embodiment of thepresent invention;

FIGS. 3A and 3B are views depicting a method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 4A and 4B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 5A and 5B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 6A and 6B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 7A and 7B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 8A and 8B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 9A and 9B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 10A and 10B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 11A and 11B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 12A and 12B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 13A and 13B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 14A and 14B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 15A and 15B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 16A and 16B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 17A and 17B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 18A and 18B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 19A and 19B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 20A and 20B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 21A and 21B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 22A and 22B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 23A and 23B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 24A and 24B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 25A and 25B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 26A and 26B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 27A and 27B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 28A and 28B are views depicting the method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 29A and 29B are graphs used to explain the characteristics of thesemiconductor device manufactured by method for manufacturing thesemiconductor device according to the first embodiment of the presentinvention;

FIGS. 30A and 30B are views depicting a mask used in a method formanufacturing of a semiconductor device according to a second embodimentof the present invention;

FIGS. 31A to 31L illustrate a process flow diagram illustrating an HCBTaccording to the second embodiment of the present invention;

FIG. 32 is a graphical view illustrating a Gummel plot of adouble-polysilicon type HCBT according to the second embodiment of thepresent invention, in comparison with that of a single-polysilicon typeHCBT;

FIG. 33 is a graphical view illustrating the output characteristics ofthe double-polysilicon type HCBT according to the second embodiment ofthe present invention, in comparison with that of a single-polysilicontype HCBT;

FIG. 34 is a graphical view illustrating the dependence of the cutofffrequency (fT) and the maximum oscillation frequency (fmax) of thedouble-polysilicon type HCBT according to the second embodiment of thepresent invention on a collector current (IC), in comparison with thatof a single-polysilicon type HCBT;

FIGS. 35A and 35B are views depicting an application example of aprocess according to the second embodiment of the present invention;

FIGS. 36A to 36D are views depicting dummy gate polysilicon according toa third embodiment of the present invention;

FIGS. 37A to 37H illustrate a process flow applied to the dummy gatepolysilicon explained in FIG. 36;

FIGS. 38A to 38C are views depicting the effects of the dummy gatepolysilicon according to the third embodiment of the present invention;

FIGS. 39A to 39C are views depicting a process not using the dummy gatepolysilicon in order to make a comparison with the process using thedummy gate polysilicon illustrated in FIG. 38A to FIG. 38C;

FIG. 40 is a graphical view illustrating a Gummel plot of a HCBT formedby the process using the dummy gate polysilicon according to the thirdembodiment of the present invention, in comparison with a Gummel plot ofan HCBT formed by the process not using the dummy gate polysilicon;

FIGS. 41A and 41B are views illustrating an HCBT having a double-emitterstructure according to a fourth embodiment 4 of the present invention,in comparison with an HCBT having a single-emitter structure;

FIGS. 42A to 42D are cross-sectional views of the double-emitter HCBTstructure according to the fourth embodiment of the present invention,FIG. 42B is a cross-sectional view taken along a plane 452 shown in FIG.42A, FIG. 42C is a view depicting a depletion layer and an electricfield in the cross section illustrated in FIG. 42B, and FIG. 42D is agraphical view illustrating a potential and an electric field in FIG.42B;

FIGS. 43A to 43C are views depicting a lithography mask used in an HCBTprocess according to the fourth embodiment of the present invention;

FIGS. 44A to 44S illustrate a process flow of the HCBT according to thefourth embodiment of the present invention;

FIG. 45 is a graphical view illustrating a Gummel plot of a HCBT havinga double-emitter structure according to the fourth embodiment of thepresent invention, in comparison with that of a HCBT having asingle-emitter structure;

FIG. 46 is a graphical view illustrating the output characteristics ofthe HCBT having the double-emitter structure according to the fourthembodiment of the present invention, in comparison with that of a HCBThaving a single-emitter structure;

FIG. 47 is a graphical view illustrating the dependence of the cutofffrequency (fT) and the maximum oscillation frequency (fmax) of the HCBThaving the double-emitter structure according to the fourth embodimentof the present invention on a collector current (IC), in comparison withthat of an HCBT having a single-emitter structure;

FIG. 48 is a view illustrating the HCBT according to the fourthembodiment of the present invention and a CMOS transistor integrated onthe same substrate;

FIG. 49 is a cross-sectional view of an HCBT described in a patentdocument which is a related art of the present invention;

FIGS. 50A to 50F are views depicting problems with the related art; and

FIG. 51 is a view schematically illustrating a state in which an activeregion is etched in the related art.

DESCRIPTION OF SYMBOLS

1, 311, 411: Si substrate

6, 320, 420: Shallow trench isolation (device isolating oxide film)

11, 312, 412: n-hill layer

20, 316, 416: Extrinsic base layer

23, 327, 427: Intrinsic base layer

24, 328, 428: Ultrathin oxide film

30, 329, 429: Polysilicon

32 a, 32 b, 335, 435: Spacer

35, 439: Emitter diffusion layer

36: Collector diffusion layer

41, 442: Silicide

50, 344, 444: Contact hole

301, 401: Active mask

302, 402: n-hill ion implantation mask

303, 403: Base mask

304, 404 a, 404 b: Device isolating oxide film etching mask

305, 405: n+ ion implantation mask

306 a, 306 b, 406 a, 406 b: Silicidation blocking mask

307, 407: Contact mask

313, 413 a: Collector ion implantation

315 a, 415 a: Extrinsic base ion implantation

319: Emitter window

321, 421: Side surface of n-hill layer 324, 413 b: Ion implantation ofadditional collector (SIC)

326, 426 a, 426 b: Ion implantation of intrinsic base

328: Active region of transistor's side surface

331, 434: Depression

332, 910, 432: Emitter polysilicon

337, 437: Collector contact region

408: Polysilicon mask used to improve polysilicon planarization

706: Dummy gate polysilicon

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a method for manufacturing a semiconductor device accordingto the first embodiment of the present invention will be described withreference to the accompanying drawings.

First Embodiment

FIG. 1 is a top view of the semiconductor device according to a firstembodiment of the present invention, and is used to explain a state inwhich a lateral bipolar transistor and a CMOS transistor arehybrid-integrated. The semiconductor device according to the firstembodiment is configured by hybrid-integrating an HCBT 100, which is thelateral bipolar transistor, and a CMOS transistor 200 on a deviceisolating oxide film 6 formed on an Si substrate to serve as a shallowtrench isolation. In a region of the device isolating oxide film 6 inwhich the HCBT 100 is formed is described as an HCBT region 60, an aregion the device isolating oxide film 6 in which the CMOS transistor200 is formed is described as a CMOS region 70.

As illustrated in the figure, the HCBT 100 includes a collector, a baseand an emitter. The collector has a collector electrode 31B and theemitter has an emitter electrode 31A. The base has an extrinsic baselayer 20 and an intrinsic base layer 23 on an active region (n-hilllayer) 11, though only the extrinsic base layer 20 is visible from theupper surface of the HCBT 100. An interconnect layer 51 is formed ineach electrode of the collector, base and emitter through a contact hole50 illustrated in FIG. 2.

On the other hand, the CMOS transistor 200 is configured by forming agate electrode 13 on a well layer 10. Interconnect layers 51 are formedin the well layer 10 and the gate electrode 13 through the contact hole50 illustrated in FIG. 2.

FIG. 2 is a cross-sectional view used to explain a configuration of thesemiconductor device according to the first embodiment, where FIG. 2Aillustrates the HCBT 100 and FIG. 2(B) illustrates the CMOS transistor200.

The HCBT 100 includes: an open region 21 opened by etching the deviceisolating oxide film 6 which is a device isolating region surroundingthe n-hill layer 11; the emitter electrode 31A and the collectorelectrode 31B which are polysilicon films formed within the open region21; and an ultrathin oxide film 24 covering at least a part of then-hill layer 11. The polysilicon films to serve as the emitter electrode31A and the collector electrode 31B have such a thickness (filmthickness) as to expose the n-hill layer 11.

The polysilicon films to serve as the emitter electrode 31A and thecollector electrode 31B are set to a thickness illustrated in the figureby etching a polysilicon film formed on the n-hill layer 11. Theultrathin oxide film 24 is a protective film for preventing the n-hilllayer 11 from being etched during etching performed to form the emitterelectrode 31A and the collector electrode 31B.

In the first embodiment, the ultrathin oxide film 24 is set to such athickness as to prevent the n-hill layer 11 from being etched in alater-described polysilicon etching process.

The extrinsic base layer 20 and the intrinsic base layer 23 to serve asa base region, an emitter diffusion layer 35, and a collector diffusionlayer 36 are provided in the n-hill layer 11 of the HCBT 100.

The emitter diffusion layer 35 is electrically connected to aninterconnect layer 51 (denoted as E in the figure) through the emitterelectrode 31A. In addition, the collector diffusion layer 36 iselectrically connected to another interconnect layer 51 (denoted as C inthe figure) through the collector electrode 31B. The extrinsic baselayer 20 and the intrinsic base layer 23 are electrically connected toanother interconnect layer 51 (denoted as B in the figure).

In the CMOS region 70, a P- or N-type well layer 10 is formed in the Sisubstrate. The CMOS transistor 200 includes a gate oxide film 12 formedunderneath the gate electrode 13 on the well layer 10. In addition, theCMOS transistor 200 includes an impurity layer 34 provided on each sideof the gate electrode 13 to serve as a source or a drain. Each impuritylayer 34 is electrically connected to an interconnect layer 51 to serveas a source electrode S or a drain electrode D.

(Manufacturing Process)

Hereinafter, a method for manufacturing the semiconductor deviceaccording to the first embodiment will be described with reference toFIGS. 3 to 27. In FIGS. 3 to 27, suffix A of each figure number denotesa manufacturing process of the HCBT 100 and suffix B denotes amanufacturing process of the CMOS transistor 200.

In the manufacturing method according to the first embodiment, the CMOStransistor 200 and the HCBT 100 are formed on a P-type Si substrate 1 toconfigure a BiCMOS transistor. In the first embodiment, the Si substrate1 is a wafer having a specific resistance of 9 to 12 Ω·cm fabricatedfrom single-crystal Si.

Next, in the first embodiment, an oxide film (SiO₂ film) 2 is formed onthe Si substrate 1, as illustrated in FIGS. 3A and 3B. Subsequently, anSi nitride film (SiN film) 3 is formed on the oxide film 2. The oxidefilm 2 is approximately 10 nm thick and the Si nitride film 3 isapproximately 140 nm thick. It is to be noted that the Si nitride filmhas an Si₃N₄ composition in many cases.

Next, as illustrated in FIGS. 4A and 4B, a resist pattern R1 coveringthe active regions of the HCBT 100 and CMOS transistor 200 is formedthereon. The oxide film 2 and the Si nitride film 3 are dry-etched withthe resist pattern R1 used as a mask to pattern the films. After theetching, the resist pattern R1 is removed by asking or the like.

The Si substrate 1 is dry-etched with the patterned oxide film 2 and Sinitride film 3 used as masks, as illustrated in FIGS. 5A and 5B. By thedry etching, a shallow trench 4 is formed on the Si substrate 1. Theshallow trench 4 is approximately 350 nm deep.

After the formation of the shallow trench, an oxide film 5 is formed byCVD, as illustrated in FIGS. 6A and 6B. For the oxide film 5, a TEOS(Tetra Ethyl Ortho Silicate) film (an oxide film formed by a reactionbetween Si(OC₂H₅)₄ and oxygen O₂), for example, is used. The TEOS filmis approximately 600 nm thick.

The oxide film 5 is subjected to a planarization process by CMP(Chemical Mechanical Planarization), as illustrated in FIGS. 7A and 7B.By the planarization process, an oxide film material is buried in theshallow trench 4 to form a device isolating oxide film 6 including ashallow trench isolation (STI).

The CMP is stopped before the Si nitride film 3 is entirely removed.Consequently, the n-hill layer 11 is protected by the Si nitride film 3from abrasion. The remaining thickness of the Si nitride film 3 afterCMP is approximately 60 nm. The remaining Si nitride film 3 iscompletely removed after the CMP. This removal is possible by, forexample, soaking the Si nitride film 3 in a phosphoric acid solution of150° C. for approximately 60 minutes.

After the removal of the Si nitride film 3, the oxide film 2 underneaththe Si nitride film 3 is removed. In the first embodiment, the oxidefilm 2 is completely removed by wet-etching the film using ahydrofluoric acid (HF)-based solution. This wet etching is performed onthe condition that, for example, the oxide film 2 is soaked in a dilutefluorinated acid solution having a composition ratio of HF:H₂O=1:99 for4 to 5 minutes.

After the removal of the Si nitride film 3 and the oxide film 2, anupper portion of the n-hill layer 11 is subjected to thermal oxidationtreatment to form a pad oxide film 7, as illustrated in FIGS. 8A and 8B.The pad oxide film 7 is approximately 15 nm thick.

Next, as illustrated in FIG. 9B, a resist R2 having a pattern in whichan opening is defined only on the active region for ion implantation isformed in the CMOS region 70. At this time, the active region and thedevice isolating oxide film 6 of the HCBT region 60 are covered with theresist pattern R2, as illustrated in FIG. 9A. The resist pattern R2serves as a mask for various types of ion implantation intended for thepurposes of formation of the well layer 10 of the CMOS region 70 and thethreshold adjustment thereof. For this reason, the resist pattern R2 mayin some cases be re-formed several times, according to the purpose ofion implantation.

After the ion implantation, the resist pattern R2 is removed. After theseparation, annealing is performed in order to diffuse implanted ions.The annealing is performed by means of, for example, RTA (Rapid ThermalAnnealing) at 950° C. for 10 seconds. As the result of the annealing,the well layer 10 is formed, as illustrated in FIG. 10B.

Subsequently, in order to implant ions into the HCBT region 60, a resistpattern R3 in which an opening is defined only in the active region ofthe HCBT region 60 is formed, as illustrated in FIG. 11A. At this time,the active region and the device isolating oxide film 6 of the CMOSregion 70 are covered with the resist pattern R3, as illustrated in FIG.11B.

In the active region of the HCBT region 60, an N-type impurity ision-implanted with the resist pattern R3 used as a mask. For the N-typeimpurity, phosphorous (P), for example, is used. The ion implantation iseffectively performed by setting implantation energy in the followingthree process steps, for example:

3.0×10¹²/cm², 220 keV

5.0×10¹²/cm², 220 keV

3.0×10¹¹/cm², 220 keV

After the completion of the ion implantation, the resist pattern R3 isremoved, as illustrated in FIGS. 12A and 12B. An N-type impurity regionformed by the ion implantation is a region functioning as a collectordiffusion layer. This region is described as the n-hill layer 11. Thepad oxide film 7 on the n-hill layer 11 is removed by wet-etching thelayer by using, for example, a hydrofluoric acid-based solution afterthe separation of the resist pattern R3.

After the removal of the pad oxide film 7, a gate oxide film 12 isformed on the n-hill layer 11, as illustrated in FIGS. 13A and 13B. Thegate oxide film 12 is an approximately 2.9 nm-thick oxide film formedby, for example, wet oxidization at 850° C. for 45 seconds. On the gateoxide film 12, a polysilicon (not illustrated) film is formed. Thepolysilicon film is formed by, for example, CVD to have a thickness of25 nm. Phosphorous, boron or the like is implanted into the polysiliconfilm in order to impart conductivity to the film.

Next, a resist pattern (not illustrated) corresponding with the shape ofa gate electrode is formed on the active region of the CMOS region 70.Then, a gate electrode 13 illustrated in FIG. 13B is formed bydry-etching the polysilicon film with the resist pattern used as a mask.

Here in the first embodiment, extremely light wet etching usinghydrofluoric acid is performed for the purpose of reinforcing the gateoxide film 12 at edges of the gate electrode 13. After the wet etching,a thermal oxidation treatment is performed once again to form an oxidefilm 14 illustrated in FIGS. 14A and 14B. The oxide film 14 isapproximately 2.5 nm thick. In addition, after a resist pattern (notillustrated) for covering the HCBT region 60 is formed, an n- or p-layer15 is formed by ion implantation corresponding to the extension of theCMOS transistor 200. An impurity to be implanted is, for example,phosphorous if the CMOS transistor is an NMOS transistor or, forexample, boron if the CMOS transistor is a PMOS transistor.

Next, a resist pattern R4 for partially covering the HCBT region 60 isformed on the oxide film 14 thereof, as illustrated in FIG. 15A. Byion-implanting a p-type impurity with the resist pattern R4 used as amask, an extrinsic base layer 20 is formed in the n-hill layer 11 of theHCBT 100. It is to be noted that during this time, the upper surface ofthe CMOS region 70 is entirely covered with the resist pattern R4.

According to the first embodiment as described above, since thesidewalls of the n-hill layer 11 are not exposed at the time of formingthe extrinsic base layer 20, it is possible to prevent the formation ofthe extrinsic base layer 20 from affecting an intrinsic base layer 23 tobe described later.

The p-type impurity implanted to form the extrinsic base layer 20 maybe, for example, BF₂+, implantation energy may be 15 keV, and a doseamount may be 1.5×10¹⁵/cm². The implanted impurity is preferablysubjected to RTA for activation after the separation of the resistpattern R4 by asking.

After the separation of the resist pattern R4, a resist pattern R5 isformed on the device isolating oxide film 6, as illustrated in FIG. 16A.The resist pattern R5 is formed so as to sandwich the n-hill 11 of theHCBT region 60. By wet-etching the device isolating oxide film 6 withthe resist pattern R5 used as a mask, an open region 21 is formed. Aportion 6A of the device isolating oxide film 6 after having beenreduced by wet etching is approximately 100 nm thick.

The oxide film 14 illustrated in FIG. 15 is removed at the time of thewet etching. After the completion of the wet etching, the resist patternR5 is removed by, for example, ashing.

Next, as illustrated in FIGS. 17A and 17B, an oxide film 22 is formed inthe HCBT region 60 and the CMOS region 70. The oxide film 22 is, forexample, a TEOS film formed by CVD. The oxide film 22 is approximately10 nm thick.

Next, a resist pattern R6 is formed on the HCBT region 60 and the CMOSregion 70, as illustrated in FIGS. 18A and 18B. The resist pattern R6 isthe same as the resist pattern R4 illustrated in FIG. 15. With theresist pattern R6 used as a mask, a p-type impurity is ion-implanted inthe active region of the HCBT region 60. By the ion implantation, theintrinsic base layer 23 is formed on a sidewall of the n-hill layer 11.The p-type impurity to be ion-implanted is, for example, BF₂+. Theimpurity is desirably implanted obliquely at a dose amount of, forexample, 7.0×10¹³/cm² at an implantation energy of, for example, 35 keV.The resist pattern R6 is removed by ashing or the like after the ionimplantation.

After the separation of the resist pattern R6, an ultrathin oxide film24 is formed in the HCBT region 60 and the CMOS region 70, asillustrated in FIGS. 19A and 19B. The ultrathin oxide film 24 can beformed by, for example, performing RTA for 60 seconds under nitrogenatmosphere of 700° C. The ultrathin oxide film 24 is approximately 6 to8 angstrom thick. The ultrathin oxide film 24 is, as a matter of course,also formed in portions of the CMOS region 70 where a silicon-containingmember is exposed.

As illustrated in FIGS. 20A and 20B, a polysilicon film 30 is formed onthe ultrathin oxide film 24 by CVD. As a material for the polysiliconfilm 30, in-situ doped polysilicon is used. The in-situ dopedpolysilicon refers to a member in which a high-concentration N-typeimpurity, such as phosphorus, can be introduced during deposition.

The polysilicon film 30 in the first embodiment has an impurityconcentration of approximately 1.0×10²⁰/cm³ and a thickness ofapproximately 700 nm. The polysilicon film 30 has such a thickness asnecessary to completely bury the open region 21 and allow a surface ofthe polysilicon film 30 to be planarized.

The polysilicon film 30 is etched back in the next process. The HCBTregion 60 and the CMOS region 70 after the completion of the etch backprocess are shaped as illustrated in FIGS. 21A and 21B. The etch backprocess is performed with a TMAH solution. The TMAH solution is anetchant extremely high in etching selectivity between a polysilicon filmand an oxide film. Consequently, the n-hill layer 11 of the HCBT 100 andthe CMOS transistor 200 of the CMOS region 70 are protected by theultrathin oxide film 24 serving as a protective film from etching damageduring the etch back process.

In the first embodiment as described above, it it possible to protectthe n-hill layer 11 and the CMOS region 70 from any damage in the etchback process. Consequently, this makes it possible to prevent such aphenomenon, as illustrated in FIG. 51, in which the active region isabraded away.

In addition, the etch back process of the polysilicon film 30 with aTMAH solution progresses isotropically. Accordingly, the etch backprocess is expected to make planar a surface of the polysilicon film 30(polysilicon film 31) substantially, after the etching is performed withthe use of the TMAH solution.

Next, as illustrated in FIGS. 22A and 22B, an oxide film 32, which is aTEOS film, is formed by CVD on the HCBT region 60 and CMOS region 70after he etch back process is performed. The oxide film 32 isapproximately 100 nm thick. The formed oxide film 32 is etched back bydry etching. As illustrated in FIG. 23A, a spacer 32A is formed in then-hill layer 11 of the HCBT region by the etch back process. Inaddition, a spacer 32B for a gate electrode 13 is formed in the CMOSregion 70, as illustrated in FIG. 23B. The spacer 32A, makes it possibleto prevent the extrinsic base layer 20 and the emitter electrode 31Afrom being electrically short-circuited to each other by a subsequentsilicide formation process.

The ultrathin oxide film 24 on the upper surface of the n-hill layer 11is removed when the oxide film 32 is etched back, and cannot be observedin the completed HCBT 100. However, the ultrathin oxide film 24 on theperipheral surface of the n-hill layer 11 still remains in the HCBT 100,as illustrated in FIG. 2A.

Next, an oxide film 33, which is a TEOS film, is formed on the HCBTregion 60 and the CMOS region 70 by CVD. After that, a resist pattern R7is formed. The oxide film 32 is approximately 10 nm thick. The resistpattern R7 covers the HCBT region 60, as illustrated in FIG. 24A, anddefines an opening in the active region of the CMOS transistor 200, asillustrated in FIG. 24B. Ions are implantated for forming an impuritylayer 34 on the CMOS region 70 with the resist pattern R7 used as amask. The impurity layer 34 is an N+ layer if the CMOS transistor 200 isan NMOS transistor, and a P+ layer if the CMOS transistor 200 is a PMOStransistor. The resist pattern R7 is removed by asking or the like.

After the ion implantation, the HCBT region 60 and the CMOS region 70are subjected to RTA under a nitrogen atmosphere including a smallamount of oxygen in order to activate the impurity layer 34. RTAconditions are set as, for example, 950° C., for 10 seconds. By the RTA,as illustrated in FIG. 25A, phosphorous, which is an N-type impurity, issolid-phase diffused from the emitter electrode 31A and the collectorelectrode 31B. By the solid-phase diffusion, an emitter diffusion layer35 and a collector diffusion layer 36 are simultaneously formed onsidewalls of the n-hill layer 11. The emitter diffusion layer 35functions as an emitter electrode.

Next, as illustrated in FIGS. 26A and 26B, an oxide film 40, which is aTEOS film, is formed on the HCBT region 60 and the CMOS region 70 byCVD. The oxide film 40 is approximately 30 nm thick.

Next, in the first embodiment, a resist pattern R8 for partiallycovering the upper surface of the n-hill layer 11 is formed, asillustrated in FIG. 27A. With the resist pattern R8 used as a mask, theoxide film 40 is slightly dry-etched. By the etching of the oxide film40, it is made possible to prevent the extrinsic base layer 20 and then-hill layer 11 from being short-circuited to each other by silicide.

In addition, by the etching of the oxide film 40, spacers 40A are formedbeside a spacer 32A for isolating an emitter and a base from each otherand beside a spacer 32B of the CMOS transistor 200, as illustrated inFIGS. 27A and 27B. However, the spacer 40A is extremely small in width,so does not affect the characteristics of the HCBT 100 and the CMOStransistor 200.

In addition, in the first embodiment, a cobalt (Co) film, for example,is formed as a metal film over the entire surface of the Si substrate 1by sputtering. The Si substrate 1, in which the Co film has been formed,is heat-treated to form a cobalt silicide (CoSi) film on a silicon layeror a polysilicon layer in direct contact with the Co film.

That is, as illustrated in FIG. 28A, a cobalt silicide 41 is formed onthe extrinsic base layer 20 in a self-aligned manner by a salicideprocess. The cobalt silicide 41 is also formed in portions, among thoseof the emitter electrode 31A and the collector electrode 31B, exposedout of the spacer 32A and the spacer 40A.

In addition, in this salicide process, the cobalt silicide 41 is alsoformed on the impurity layer 34 and the gate electrode 13 of the CMOStransistor 200, as illustrated in FIG. 28B.

Next, an Si nitride film, a PSG film, a plasma TEOS film, or the like isdeposited over the entire surface of the Si substrate 1 as an interlayerinsulating film. CMP-based planarization processing is performed on thedeposited interlayer insulating film, as necessary. Subsequently, by useof photolithographic and etching techniques, the interlayer insulatingfilm on the cobalt silicide 41 is removed to form a contact hole 50.After the formation of the contact hole 50 illustrated in FIG. 2, analuminum alloy film, for example, is formed over the entire surface ofthe Si substrate 1 by sputtering.

A mask for an interconnect pattern is formed on the aluminum alloy filmand is etched to form the interconnect layers 51 illustrated in FIG. 2.After that, a sintering process is performed on the Si substrate 1,thereby completing the semiconductor device.

In the processes heretofore described, the steps illustrated in FIGS. 5to 8 correspond to steps of forming the device isolating region in thefirst embodiment. In addition, FIG. 11A and FIG. 12A illustrate steps offorming the active region of the HCBT 100. FIG. 14B represents a step ofimplanting an impurity at least once with the gate of the CMOStransistor 200 used as a mask.

FIG. 15A illustrates a step of forming the extrinsic base layer. FIG.16A illustrates a step of removing a predetermined portion of the deviceisolating oxide film 6 surrounding the n-hill layer 11, thereby formingthe open region 21 around the n-hill layer 11. FIG. 18A illustrates astep of implanting ions in a region of a side surface of the activeregion exposed by the formation of the open region 21 and partiallyoverlapped with the extrinsic base layer 20, thereby forming theintrinsic base layer 23.

In addition, FIG. 19A illustrates a step of forming the ultrathin oxidefilm 24 for protecting the n-hill layer 11, during etching in asubsequent step, on a surface of the n-hill layer 11. FIGS. 20A and 20Billustrate a step of forming a polysilicon film including impurities,where FIG. 21A illustrates a polysilicon etching step. FIG. 25Aillustrates a step of forming the emitter diffusion layer region and thecollector diffusion layer region.

As has been described heretofore, according to the first embodiment ofthe present invention, it is possible to provide a semiconductor deviceand a method for manufacturing the semiconductor device in which a CMOStransistor manufacturing process does not thermally affect a bipolartransistor, formation of an emitter electrode and a collector electrodedoes not cause any damage to an active region due to etching, and theimpurity profiles of an intrinsic base layer and an extrinsic base layerincluded in the base layer of the active region do not affect eachother.

That is, in according to the first embodiment, it is possible to realizea semiconductor device in which a HCBT and a CMOS transistor arehybrid-integrated. In addition, since ion implantation into the CMOStransistor of the semiconductor device is performed at least once priorto a step of forming the base of an HCBT, it is possible to mitigate theeffect of heat treatment in the CMOS transistor after the ionimplantation on the characteristics of the HCBT.

In addition, it is possible to form an ultrathin oxide film on then-hill layer of the HCBT and on the CMOS region prior to a step ofetching back a polysilicon film with the use of a TMAH solution.Consequently, it is possible to protect the n-hill layer 11 and the CMOSregion from any damage to be caused in the etch back process. Thus, thiseliminates such problems as illustrated FIG. 51 in which the n-hilllayer is abraded away.

In addition, it is possible to form the extrinsic base layer prior tothe formation of the intrinsic base layer. Since sidewalls of the n-hilllayer 11 are not exposed at the time of forming the extrinsic baselayer, it is possible to perfectly prevent ion implantation for formingthe extrinsic base layer from affecting the intrinsic base layer.

EXPERIMENTAL EXAMPLE

The inventors of the present invention manufactured a semiconductordevice using the above-described semiconductor device manufacturingmethod according to the first embodiment. FIG. 29 is a graphical viewdepicting the characteristics of the manufactured semiconductor device,and illustrates the characteristics of the HCBT 100. FIG. 29A is a graphillustrating a Vc-Ic characteristic indicating a relationship between acollector-emitter voltage Vice and a collector current Ic flowingthrough a collector electrode. FIG. 29B is a graph illustratingfT/fmax-Ic characteristics indicative of a relationship among the cutofffrequency fT, the maximum oscillation frequency fmax, and the collectorcurrent Ic. It is to be noted that the Vc-Ic characteristic illustratedin FIG. 29A was measured with a fixed base-emitter voltage Vbe.

The measurement exhibits that with the HCBT according to the firstembodiment, it is possible to obtain a breakdown voltage of 4.7 V, acutoff frequency of 40 GHz, and a maximum oscillation frequency of 50GHz.

Second Embodiment

Next, a second embodiment of the present invention will be described.The second embodiment differs from the first embodiment in a method forforming a HCBT collector contact region. That is, in the firstembodiment, solid-phase diffusion from polysilicon causes the activeregion to form the collector diffusion layer, whereas in the secondembodiment, the collector diffusion layer is directly formed in an upperportion of the active region without the intervention of polysilicon.Since polysilicon is used only for the emitter diffusion layer, such aconfiguration of the second embodiment will be referred to assingle-polysilicon type HCBT.

FIG. 30A illustrates a standard mask set used for a single-polysilicontype HCBT. As illustrated in FIG. 30A, an HCBT can be hybrid-integratedtogether with a CMOS by typically using three additional masks.Integration with a fewer number of masks is also possible. FIG. 30Billustrates masks already available in a CMOS process and also used forthe HCBT.

The HCBT, like the CMOS, is normally formed on a P-type Si substrate. Aninitial stage of this formation process is the same as a standard CMOSprocess of forming a shallow trench isolation (STI). The active regionof the HCBT to be used later for a collector contact region is formed asa columnar n-hill layer surrounded by the STI. The active region isfixed by using an active mask 301 for common use with the CMOS. Afterthat, well ion implantation and the like necessary to form an n-typewell for a pMOS and a p-type well for an nMOS are carried out. Both ofthese wells are essential to CMOS technology.

In order to form not only other types of devices (for example,resistors, capacitors and inductors) but also different types oftransistors (for example, those optimized for high-speed, highlyvoltage-resistant, high-current applications) on the same substrate,different doping concentrations are needed. In addition, differentdoping profiles and gradients may be necessary in some cases, in orderto obtain desired device characteristics. These doping profiles andgradients are usually implemented by ion implantation.

As an ion implantation step of forming the collector of the HCBT, it ispossible to use a single ion implantation step or a combination ofseveral ion implantation steps used for the CMOS, depending on thecombination of CMOS technology and targeted characteristics of the HCBT.For an NPN-type transistor, moderate n-type doping is needed in order toform an n-hill layer.

In this case, it is possible to use CMOS masks to be used for n-well ionimplantation for doping into the n-hill layer 312 of the HCBT. Moregenerally, the n-hill layer 312 is formed separately from the CMOS, asillustrated in FIG. 31A, by use of the additional mask 302 illustratedin FIG. 30A. This mask is a first additional mask necessary to form theHCBT.

Ion implantation into the n-hill layer 312 should be adjusted in orderto obtain a doping profile of the n-hill layer 312 optimized for thecharacteristics of the HCBT. The doping profile is achievable by meansof several steps of ion implantation, which are performed on thecondition that, for example, phosphorous is implanted at 200 keV and3×10¹² cm⁻² and at 100 keV and 5×10¹² cm⁻².

Under these conditions, it is possible to create a relativelyhigh-concentration peak in an upper portion of the n-hill layer 312,thereby suppressing a base expansion effect. This means that it ispossible to optimize high-frequency characteristics. Such an even moreuniform electric field distribution achieves a high breakdown voltage.After the well-forming ion implantation of the CMOS process isperformed, a photoresist is removed. In order to recover silicon crystaldamaged by the ion implantation and to electrically activate theimplanted impurity, high-temperature annealing is carried out. Ionimplantation into the n-hill layer of the HCBT is carried out,immediately before or immediately after the well ion implantation of theCMOS is performed. This is because the annealing step of the CMOSprocess is also used for the crystal recovery of the HCBT and dopantactivation.

After the completion of the well-forming ion implantation, a gate stackis normally formed in the CMOS process. During gate oxidization, then-hill layer for the HCBT is also oxidized. During polysilicon gateetching in the CMOS process, an HCBT region is exposed and polysiliconon the n-hill layer is removed. After the polysilicon etching, the gateof the MOS transistor is lightly oxidized and the etched polysilicongate region is covered with an ultrathin oxide film. Next, anotherdifferent MOS transistor is once again selected by another differentmask to perform ion implantation on a source/drain extension. At thispoint in the CMOS process, a second additional mask 303 illustrated inFIG. 30A and necessary for the HCBT is applied.

In this ion implantation, extrinsic base ion implantation 315 a iscarried out, while protecting the CMOS portion of a chip with aphotoresist 317, as illustrated in FIG. 31B, thereby forming anextrinsic base layer 316. Examples of conditions of the extrinsic baseion implantation 315 a include implanting BF₂ at an energy of 18 keV andat a dose amount on the order of 10¹⁵ cm⁻². In the CMOS process, anannealing treatment is performed at a high temperature after the ionimplantation of the source/drain extension is performed. The same stepas described above is also used in an annealing treatment for the ionimplantation of the extrinsic base layer 316 to recover silicon singlecrystal and activate ionic species.

If the CMOS process does not include any annealing treatment orannealing conditions are not suitable for the HCBT, the extrinsic baseion implantation 315 a may be performed prior to the ion implantation ofthe source/drain extension to apply an additional annealing treatment.The annealing temperature and time are, in general, lower and shorterthan or equal to the conditions of gate oxidization. Accordingly,effects to be exerted on the CMOS are not so serious even if anannealing treatment is added. Coincidentally, the source/drain regionsof the CMOS most sensitive to heat treatment have not yet been formed atthis point of time.

After the process of annealing the source/drain extension of the CMOS, athird additional mask 304 necessary for the HCBT is used. This is a stepof protecting the entire CMOS by use of a photoresist 318 and opening anemitter window 319 of the HCBT. As illustrated in FIG. 31C, a deviceisolating oxide film 320 is etched with this mask used for a givenperiod of time. Either wet etching or dry etching is applicable. Theetching is set so as to define the intrinsic base layer of thetransistor, thereby exposing a side surface 321 of the n-hill layer 312.After the etching of the device isolating oxide film, a thin screeningoxide film 322 is formed. This film has the purpose of alleviatingdamage due to implanted ionic species and protecting a silicon surface.This is a method commonly used in ion implantation.

Next, as illustrated in FIG. 31D, intrinsic base ion implantation 326 iscarried out at a certain angle once again by using the second additionalmask 303 illustrated in FIG. 30A. Consequently, a p-type intrinsic baselayer 327 is formed on a side surface of the n-hill layer. The intrinsicbase ion implantation 326 is carried out on the condition that, forexample, BF₂ is implanted at an angle of 30 degrees, at an energy of 30keV with a dose amount of 5×10¹⁴ cm⁻². In order to obtain the optimumdoping profile, intrinsic base ion implantation may be carried out inseveral steps.

The additional mask 304 of the HCBT used to etch the device isolatingoxide film has a certain angle with respect to the active mask 301, asillustrated in FIG. 30A. This angle is set for the purpose of making thedevice isolating oxide film extremely thin at a boundary with the n-hilllayer 312. The oxide film thus varied in thickness has the effect ofgradually blocking the impurity of a base at a frame of the emitterwindow.

By doing so, base ion implantation is caused to partially penetrate theoxide film. That is, this method increases the impurity concentration ofthe base around the emitter and can eventually prevent collector-emitterpunch-through.

Extrinsic base ion implantation can be alternatively carried out at thistiming rather than prior to etching the device isolating oxide film. Inthis case, the additional mask 303 for the base ion implantation may beused only once, therefore reducing the number of process steps. Asillustrated in FIG. 31E, the extrinsic base ion implantation 315 b inthis case may preferably be carried out at a wafer rotation angleopposite to that of the intrinsic base layer in order to prevent animpurity from being excessively implanted into the side surface of then-hill layer 312.

Meanwhile, the extrinsic base ion implantation can also be carried outin a direction 315 c perpendicular to a wafer or at an implantationangle 315 d that is same as or different from that of the intrinsic baselayer, thereby intentionally increasing the concentration of theintrinsic base layer 327. By varying the implantation angle and therotational angle, it is possible to optimize the impurity profiles ofthe intrinsic base layer 327 and those of the extrinsic base layer 316.The intrinsic base layer 327 and the extrinsic base layer 316 areexposed to the same annealing process. The extrinsic base layer 316 mayenhance the diffusion of boron of the intrinsic base layer 327, thuspossibly widening a base width.

This is in general not desirable in light of a current gain andhigh-frequency characteristics. In addition, the concentration of theintrinsic base layer 327, particularly the concentration of the bottomthereof, may become too high due to ion scattering within the deviceisolating oxide film 320 of the extrinsic base layer 316. This effectneeds to be taken into consideration when determining the ionimplantation parameters of these layers. That is, in order to minimizeexcessive doping in the bottom portion of the base, the angle of the ionimplantation 315 b is desirable.

After the completion of the ion implantation of the intrinsic base layer327 and the extrinsic base layer 316, a photoresist 325 is removed andthe thin screening oxide film 322 is etched. Since the thin screeningoxide film 322 is also formed on the CMOS, time management should beperformed for this etching so that a thermally-oxidized film which hasgrown on the polysilicon gate of the CMOS is not removed. Accordingly,the etching time of the thin screening oxide film 322 is adjusted sothat only an oxide film on the side surface of the n-hill layer isexactly removed.

Since the oxide film on the side surface of the n-hill layer 312 hasundergone the ion implantation of the intrinsic base layer 327 or, insome cases, of the extrinsic base layer 316, the oxide film is faster inthe etching rate than an oxide film on the CMOS gate which has notundergone the ion implantation. This has the effect of increasingmargins related to the etching time, when compared with a conventionalHCBT in which a thin screening oxide film on the collector-side sidesurface of the n-hill layer 312 also needs to be removed.

The thin screening oxide film 322 is formed by means of deposition andis, therefore, faster in etching rate than the thermally-oxidized filmon the CMOS gate. Consequently, even after the thin screening oxide film322 is etched, it is possible to leave the thermally-oxidized film onthe CMOS gate without problems.

Upon completion of the removal of the thin screening oxide film 322, asilicon surface is exposed on the side surface of the n-hill layer 312.An annealing treatment is performed on this surface in order to form aterminal layer of silicon. The treatment of the surface is carried outby using, for example, rapid thermal annealing (RTA) under a nitrogenatmosphere at 800° C. for 20 seconds. With the surface thus treated, itis possible to prevent the surface from growing epitaxially at the timeof subsequent polysilicon deposition. In addition, the surface can serveas a protective layer of the n-hill layer 312 at the time of polysiliconetching.

An ultrathin oxide film 328 formed by the surface treatment can also begrown on the exposed silicon surface by use of oxygen remaining within achamber. Alternatively, the ultrathin oxide film 328 can also be formedby means of another silicon surface termination treatment. This oxidefilm, irrespective of the chemical composition thereof, behaves as astopping film of polysilicon etching essential to an HCBT process. Theultrathin oxide film 328 has to be thin enough, however, for a currentto flow with no increase in resistance.

This annealing treatment causes the dopant of the ion-implanted base todiffuse, so profile redistribution takes place.

Next, as illustrated in FIG. 31F, a polysilicon film 329 is deposited.Since The polysilicon film 329 functions as an emitter of the transistorit needs to be doped to a high concentration. The high-concentrationdoping of the polysilicon film 329 can be achieved by an in-situprocess, that is, by performing doping during deposition. Althoughin-situ doping is the easiest and simplest method, doping is alsopossible with other methods including ion implantation and diffusion.

In this case, in-situ doping is preferred from the viewpoint ofuniformity. Accordingly, it is made possible to diffuse impuritiesuniformly from the emitter to the base by the subsequent annealingtreatment. Furthermore, it is made possible to adjust the way of in-situdoping and optimize a process flow. This means that, by using undoped orlightly-doped polysilicon, it is made possible, for example, to make ashallow emitter-base junction or form an upper portion of thepolysilicon film to be undoped polysilicon in order to increase adeposition rate.

The thickness of the polysilicon film 329 correlates with the shape of aresidual polysilicon film subsequent to the etch back. The residualpolysilicon film needs to be planar, so a surface of the polysiliconfilm 329 after being deposited should be as planar as possible. Sincethe deposition of the polysilicon film 329 is a conformal process, thefilm buries the emitter window 319. A more planar surface of thepolysilicon film 329 is available with an increase in the thicknessthereof.

FIG. 31F illustrates contour lines 330 of a surface shape of thepolysilicon film 329 being deposited. Thickly deposited polysiliconallows a depression 331 to be reduced in the surface. Although thismethod is probably the simplest method of planarization, other methodswell known in a semiconductor process are also applicable. For example,these methods include CMP and burying the depression 331 with anotherlayer and then etching back the layer. However, thick deposition of thepolysilicon film prolongs the above treating time of a process, and istherefore not realistic. In addition, CMP necessitates a stopping filmfor controlling an increase in the number of steps and the completion ofpolishing.

In the case of CMP, the stopping film has to be formed on the CMOS gateor on another structure (capacitor or the like) built at this point oftime of the process. In the case of a process dealing with bipolartransistors only or in other BiCMOS integration methods, a surface of anSTI oxide film is utilized as a CMP stopping film.

After the polysilicon is deposited, the polysilicon is etched back andan emitter polysilicon region 332 as illustrated in FIG. 31G isobtained. Regions for the extrinsic base layer 316 and the intrinsicbase layer 327 have already been formed, and like the n-hill layer 312,they have to be protected during the etching back of the polysilicon. Inorder to fulfill this requirement, TMAH etching having the advantage ofhigh selectivity with respect to an oxide film is used in thepolysilicon etching. The ultrathin oxide film 328 that has been grown ona surface of the n-hill layer 312 by the treatment prior to thedeposition of the polysilicon film 329 is sufficient for stoppingtetramethylammonium hydroxide (TMAH) solution-based etching and canperfectly protect the n-hill layer 312.

To this end, other crystal-dependent etchants (for example, KOH and EDP)can also be used. In general, other polysilicon etching methods, such aswet etching and dry etching, can also be used. However, TMAH can satisfyrequirements, such as high selectivity of polysilicon against an oxidefilm and adaptability to a CMOS process. TMAH etching is therefore amethod perfectly suitable for this process.

A film thickness 333 of polysilicon determines the height of the emitterand affects the electrical characteristics of the transistor, such as acollector current, base resistance, and base-emitter capacitance.Therefore, polysilicon etching needs to be time-controlled. The rate ofTMAH-based polysilicon etching is adjustable by the temperature andconcentration of a TMAH solution.

As illustrated in FIGS. 31F and 31G, only the deposition and etch backare not sufficient for a polysilicon surface to be perfectly planar. Thedepression 331 to be generated after the deposition will eventually betransferred onto the emitter polysilicon region 332 as a depression 334.At this time, care must be taken so that any holes should not be made inthe emitter polysilicon region 332. That is, the emitter polysiliconregion 332 has to be left on the device isolating oxide film 320 thathas been etched, and contact has to be ensured even at the thinnestportion of the depression 334 of the emitter polysilicon region 332.

The rate of TMAH etching depends on the crystal plane orientation of alayer being etched. Since polysilicon is composed of crystal grainshaving different plane orientations, a polysilicon surface after TMAHetch back is markedly irregular. In order to minimize the irregularityof the polysilicon surface, polysilicon composed of even smaller crystalgrains is desired a film closer to an amorphous film is preferable. Tothis end, conditions of polysilicon deposition may be adjusted. Examplesof adjustment include a method of performing treatments at lowertemperatures.

Basically, there are no further processes to be added for the HCBT oncethe etching back of polysilicon ends. Use of a CMOS process brings theHCBT into completion. Therefore, only the CMOS formation processinfluential on the HCBT will be described hereinafter.

Normally, the next CMOS process step is the formation of a gate spacer.An oxide film, such as a TEOS film, is deposited and etched back bymeans of anisotropic etching. Thus, a spacer 335 is left beside a CMOSgate. By the nature of this step, the same spacer 335 is formed onpolysilicon as a spacer of the n-hill layer 312, as illustrated in FIG.31H. After that, ion implantation 336 is performed on the source/drainof the CMOS. The ion implantation 336 in the n+ source/drain regions ofan nMOS is also performed on the collector contact region 337 of theHCBT, as illustrated in FIG. 31I.

The positions of ends of a photoresist 338 determined with a mask 305define a distance between the collector n+ region 337 and the extrinsicbase layer 316. This distance affects transistor characteristics, suchas a collector-base breakdown voltage and a collector-emitter breakdownvoltage. The other end of the collector n+ region is determined by aside surface of the n-hill layer 312.

Annealing for the purpose of activating the ion-implanted source/drainregions of the CMOS is also used to activate the ion-implanted regionsof the HCBT region. This annealing is further used for a purposecommonly called drive-in diffusion where a diffusion region 339 isformed by the diffusion of an impurity from a heavily-doped emitterpolysilicon region 332 to the side surface of the n-hill layer 312 (seeFIG. 31J).

The doping profile of the intrinsic base layer 327 of the transistor isdetermined by this step. The depth of a base-emitter pn junction afterannealing is adjustable either by varying the impurity concentration ofthe emitter polysilicon region 332 or by varying the grain diameter ofpolysilicon. These variables are determined by the conditions ofpolysilicon deposition.

The next CMOS process step is the formation of a silicide. First, anoxide film 340 is deposited as a silicide protection film. Use of a mask306 causes some CMOSs to be made open and some devices or the regionsthereof to be protected by a photoresist 341. In the HCBT, the collectorand the ultrathin oxide film 328 are protected by the illustratedportion 306 a of the mask, and the rest of the HCBT are made open. Thiscondition is illustrated in FIG. 31J. The left oxide film 340 preventsthe collector n+ region 337 and the extrinsic base layer 316 fromelectrically short-circuiting to each other.

A silicide 342 is formed in such a manner as illustrated in FIG. 31K.This step is carried out by use of a standard method well known in asemiconductor process.

As the back-end of the process, an oxide film 343 is deposited, acontact hole 344 is defined, the contact hole is buried by alow-resistance film, and interconnect layers are formed, in a usual way.A final single-polysilicon type HCBT is illustrated in FIG. 31L alongwith contact regions.

It is to be noted that in the second embodiment, the ultrathin oxidefilm 328 is illustrated only in FIGS. 31F and 31G in consideration ofthe visibility of reference numerals shown in FIG. 31. The ultrathinoxide film 328 remains, however, on the upper and the side surfaces ofthe n-hill layer 312, as is illustrated in FIGS. 31F and 31G, in thecourse of steps subsequent to the step of FIG. 31F up to the stepillustrated in FIG. 31L.

FIGS. 32 and 33 illustrate characteristics of dependence (Gummel plots)of a collector current (IC) and a base current (IB) on a base-emittervoltage (VBE) with regard to an HCBT having a polysilicon collector anda polysilicon emitter (double-polysilicon type) and an HCBT having apolysilicon emitter and an ion-implanted collector (single-polysilicontype).

It is understood from the figures that the double-polysilicon type andsingle-polysilicon type HCBTs are almost the same in base current IB andcollector current IC. Both the base current IB and the collector currentIC depend mainly on the profile of an intrinsic base layer of atransistor. The figures represent that the double-polysilicon type andsingle-polysilicon type HCBTs are basically the same in the profile.

In both the double-polysilicon type and single-polysilicon type HCBTs,the same mask dimensions are used for base and emitter regions. Thecollector of the single-polysilicon type HCBT is an n+ region and has awider n-hill layer.

In FIG. 32, extremely similar output characteristics are observed in thedouble-polysilicon type and single-polysilicon type HCBTs. Bothstructures are also almost the same in collector-emitter breakdownvoltage (BVCEO). A slight difference in characteristics between thestructures of the two HCBTs is considered to be due to distributionswithin a wafer surface.

FIG. 34 illustrates the collector current (IC) dependence of the cutofffrequencies (fT) and maximum oscillation frequencies (fmax) of thedouble-polysilicon HCBT and the single-polysilicon HCBT. It isunderstood that the single-polysilicon type HCBT exhibits higher levelsof fT and fmax. This improvement in fT and fmax is due to thesingle-polysilicon type HCBT being larger in effective collector areathan the double-polysilicon type HCBT. In the case of thedouble-polysilicon type HCBT, the n+ polysilicon has contact with only apart of a side surface of the n-hill layer 312. In contrast, in the caseof the single-polysilicon type HCBT, the ion-implanted n+ region extendsup to an edge of the n-hill layer 312, thereby enlarging a collectorcontact region.

In addition, as described earlier, the fact that the collector n+polysilicon is thinner than the emitter n+ polysilicon in the case ofthe double-polysilicon type HCBT also contributes to making larger thedifference with the single-polysilicon type HCBT. In thesingle-polysilicon type HCBT, the collector current flows in a moreradial pattern due to the collector contact region being larger.Consequently, a collector current density at a collector-base junctionbecomes lower.

A low collector current density makes it possible to suppress a basebroadening effect known as the Kirk effect, thereby decreasing a basetransition time and improving fT. In addition, collector resistance canbe reduced in the single-polysilicon type HCBT. The effect of reductionis not so significant, however, as observed in FIG. 34.

In conclusion, fT and fmax can be improved in the single-polysilicontype HCBT without sacrificing any other transistor characteristicsthereof. This improvement in fT and fmax can be unfailingly confirmedeven if mask dimensions and technical parameters are changed in variousways.

EXPERIMENTAL EXAMPLE

In addition, the present invention is not limited to the above-describedconfigurations. For example, a step illustrated in FIG. 35A can beadded, following the step of FIG. 31C. Using the same second HCBT mask303 as used for extrinsic base ion implantation, an n-type region 323called a Selectively Implanted Collector (SIC) is formed by ionimplantation 324, as illustrated in FIG. 35A. At this time, the CMOSpart is protected by the photoresist 325. The SIC is effective inimproving the high-frequency characteristics of a transistor since theSIC increases the doping concentration of the n-hill layer 312.

That is, the base broadening effect can be suppressed without involvingany remarkable breakdown voltage drop or collector-base capacitanceincrease. The SIC is means commonly used in a vertical bipolartransistor. The SIC is not always essential, however, and an HCBT havingno SICs is also useful. Typical conditions of the ion implantation 324of the SIC include implanting phosphorous at an implantation angle of45°, and at energy and dose amount on the order of 250 keV and 10¹³cm⁻², respectively.

Alternatively, there can be a process in which the step of FIG. 35B iscarried out, for example, in place of the step illustrated in FIG. 31K.In FIG. 35B, a pattern for an oxide film is formed on a spacer 335. Inother words, the extrinsic base layer 327 and the emitter polysiliconregion 332 of the n-hill layer 312 are isolated from each other by theoxide film spacer at the side surface of the n-hill layer in the sameway as silicides are isolated between a gate and a source and between agate and a drain in a CMOS process.

In the case of the process illustrated in FIG. 31K, a silicideprotection mask is composed only of the portion 306 a illustrated inFIG. 30B. However, since the inclination of the sidewall of the n-hilllayer is smaller than 90° , only a thin spacer is left after anisotropicetching is performed. If the spacer is too thin, the silicide mayshort-circuit to the intrinsic base layer 327, or the emitterpolysilicon region 332 and the extrinsic base layer 316 may come soclose to each other that electrical characteristics are affectedadversely.

However, if the thickness of the oxide film for silicide protection isincreased, the spacer remains even if treatments are performed byanisotropic etching. On the other hand, if the oxide film is leftbetween the emitter polysilicon region 332 and the extrinsic base layer327, as illustrated in FIG. 35B, with the portion 306 b of the maskillustrated in FIG. 30, the region and the layer can be reliablyisolated from each other. In this case, the silicide blocking mask iscomposed of the portions 306 a and 306 b of the mask 306 illustrated inFIG. 30, but no changes are made to the CMOS process. However, seriesresistance between the base and the emitter may become higher.

Third Embodiment

Furthermore, if the thickness of the emitter polysilicon regiondecreases in part and a hole is defined therein, an interconnect layerimmediately above the hole fails to have adequate contact, as explainedin FIG. 31G. However, since the polysilicon 329 is deposited along thecontours of the n-hill layer 312 and the device isolating oxide film320, as illustrated in FIG. 36A, depressions 331 arise on a surface ofthe polysilicon 329. Since the shape of each of these depressions 331 istraced as the shape of the polysilicon 329 after TMAH-based polysiliconetch back is performed, a hole may be defined in polysilicon 329′ afteretch back, as illustrated in FIG. 36B.

According to the present invention, a polysilicon film called dummy gatepolysilicon 706 is formed on a surface of the device isolating oxidefilm 320, and emitter polysilicon 510 is deposited on top of the dummygate polysilicon 706. By doing so, the effects of depressions in thepolysilicon film 329 are eliminated, as illustrated in FIG. 36C. Byetching back this polysilicon film, it is possible to form an excellentpolysilicon region 910 which is planar with respect to the side surfaceof the n-hill layer, as illustrated in FIG. 36D. This dummy gatepolysilicon 706 on the device isolating oxide film 320 can be formed inthe same step as is used for a gate electrode in the CMOS process.Accordingly, this formation can be performed without involving anysignificant change in the process.

FIGS. 31A to 31H are views used to explain process steps of a thirdembodiment in which the dummy gate polysilicon 706 is used.

As illustrated in FIG. 37A, in the third embodiment, ion implantation313 for the formation of an HCBT collector is performed to form ann-hill layer 312. Subsequently, extrinsic base ion implantation 315 a isperformed to form an extrinsic base layer 316.

Next, in the third embodiment, an unillustrated polysilicon film isdeposited on the device isolating oxide film 320 and on the n-hill layer312 of a CMOS, and is patterned to simultaneously form dummy gatepolysilicon 706 and the gate electrode 902 of a CMOS transistor.

Next, as illustrated in FIG. 37B, an extrinsic base layer 316 is formedby the extrinsic base ion implantation 315 a using a photoresist patternfor exposing only a part of the n-hill layer 312.

Subsequently, in the third embodiment, the dummy gate polysilicon 706and the gate electrode 902 are covered with a photoresist 317, asillustrated in FIG. 37C, and ion implantation is performed on a sidesurface of the n-hill layer 312. As a result, the intrinsic base layer327 illustrated in FIG. 37D is formed on the side surface of the n-hilllayer 312.

Subsequently, in the third embodiment, polysilicon 329 is deposited onthe HCBT and the MOS transistor, as illustrated in FIG. 37E. Then, asillustrated in FIG. 37F, the deposited polysilicon 329 is etched back toform an emitter polysilicon region 910. Next, as illustrated in FIG.37G, a collector contact region 337 and the source/drain of the CMOStransistor are formed by ion implantation 336. After the ionimplantation 336, a spacer 911 is formed and interconnect layers denotedby C, B and E are further formed, thereby bringing the semiconductordevice being fabricated into a state illustrated in FIG. 37H.

Next, a description will be given of effects on device characteristicsexerted by the use of the dummy gate polysilicon 706. FIG. 38 is a viewdepicting the emitter polysilicon region 910 formed by a process usingthe dummy gate polysilicon according to the third embodiment. FIG. 38Aillustrates a pre-etch back state of the polysilicon 329 to serve as theemitter polysilicon region. FIG. 38B illustrates a state in which thesemiconductor device of FIG. 38A has been etched back. FIG. 38C is anenlarged view of a portion C in FIG. 38B.

As illustrated in FIG. 38, in the third embodiment, a portion of theemitter polysilicon region 910 in contact with the side surface of then-hill layer 312 is shaped to be planar by introducing the dummy gatepolysilicon. Thus, it is possible to allow for an adequate distancebetween the emitter electrode and the extrinsic base layer. This processreduces pn junction leakage, thereby decreasing a base current IB. As aresult, a current amplification factor β (=IC/IB) becomes higher.

FIG. 39 is a view shown for comparison with FIG. 38 and used to explaina process of forming the emitter polysilicon region without the dummygate polysilicon. FIG. 39A illustrates a pre-etch back state of thepolysilicon 329 to serve as the emitter polysilicon region. FIG. 39Billustrates a state in which the semiconductor device of FIG. 39A hasbeen etched back. FIG. 39C is an enlarged view of a portion C in FIG.39B.

If the dummy gate polysilicon is not used, the emitter polysiliconregion 332 is shaped so as to rise along the side surface of the n-hilllayer 312. The emitter diffusion layer according to the third embodimentis formed by the solid-phase diffusion of phosphorous from the emitterpolysilicon region and extends as far as close to an upper portion ofthe side surface of the n-hill layer 312. As a result, the emitterdiffusion layer and the extrinsic base layer come close to each other atthe upper portion of the side surface of the n-hill layer 312.

Since the emitter diffusion layer and the extrinsic base layer are of n+and p+ types, respectively, a pn junction having a high impurityconcentration is formed. The leakage current of such a junction is largeand flows irrespective of bipolar operation. This leakage current iselectrically superimposed on a base current IB, thus causing an apparentbase current IB to increase. As a result, a current amplification factorβ, which is one of the important characteristics of a bipolartransistor, becomes lower.

FIG. 40 is a graphical view used to explain the degree to which thecharacteristics of a manufactured HCBT are affected by the dummy gatepolysilicon. FIG. 40 shows Gummel plots of an HCBT which uses the dummygate polysilicon and an HCBT which does not use the dummy gatepolysilicon. In FIG. 40, the axis of ordinates represents a base current(IB) and a collector current (IC), and the axis of abscissas representsa base-emitter voltage (VBE). In addition, solid lines belong to theHCBT manufactured with the use of the dummy gate polysilicon, and dottedlines belong to the HCBT manufactured without the dummy gatepolysilicon.

As is evident from FIG. 40, any significant differences due to thepresence/absence of the dummy gate polysilicon are not observed in thecollector current IC of the bipolar transistor. However, as describedabove, a process which uses the dummy gate polysilicon suppresses aleakage current to be superimposed on the base current IB. Accordingly,it is understood that the bipolar transistor manufactured with the dummygate polysilicon is smaller in base current IB than the bipolartransistor manufactured without the dummy gate polysilicon.

Fourth Embodiment

Next, a fourth embodiment of the present invention will be described.Since it is conceivable to provide two intrinsic base layers describedin the first to third embodiments on side surfaces of the n-hill layerso as to be opposing to each other, a semiconductor device according tothe fourth embodiment has been invented in order to improve breakdownvoltages in that case.

I: Theory

FIG. 41A is a view illustrating a double-emitter structure. FIG. 41B isa view used to show a single-emitter structure in comparison with thedouble-emitter structure. Both the double-emitter structure and thesingle-emitter structure include an Si substrate 411 and an n-hill layer412.

The n-hill layer 412 is formed in an active region. The Si substrate 411has a p-type polarity, while the n-hill layer 412 has an n-typepolarity. The single-emitter structure includes an extrinsic base layer416 on an upper surface of the n-hill layer 412. In addition, anintrinsic base layer 427 is formed on one side of a side surface of then-hill layer 412. The double-emitter structure includes an n-hill layer412 having two opposing side surfaces on a surface of a p-type Sisubstrate identical to the Si substrate 411.

A depletion region D1 of the double-emitter structure extends over theentire range of the n-hill layer 412 in the direction of an arrowed lineA1. On the other hand, a depletion region D2 of the single-emitterstructure extends in such a manner as shown by an arrowed line A2 inFIG. 41B.

A horizontal cross-sectional view taken along a line parallel to a wafersurface of the double-emitter structure and denoted by reference numeral452 in FIG. 42A is shown as 42B and FIG. 42C. The main idea of thedouble-emitter structure is to bring two intrinsic transistors(emitter-base-collector) close to each other in mutually oppositedirections. Doing so causes the emitter region 439 and the intrinsicbase layer 427 to be formed on side surfaces opposing to each other andconnect to a collector at a central part of the n-hill layer. Inaddition, collector contact regions 437 connected to each other througha low-resistance path are disposed in lateral positions with respect toan intrinsic base-collector junction.

Charges of the collector at the central part are distributed to the twointrinsic base layers 427, the extrinsic base layer 416 and the Sisubstrate 411. The amounts of distribution can be controlled by varyinga distance between the two intrinsic base layers 427, that is, byvarying a collector width 453. If the charges of the collector arecompletely distributed to the two intrinsic base layers 427, thecollector is completely depleted. Thus, the collector no longer holds anamount of charges large enough to maintain an electric field in adirection orthogonal to an intrinsic base layer-collector junction. Anelectrical potential φ(X) and an electric field F(X) in the plane 447 ofFIG. 42B are shown in FIG. 42D.

The maximum electric field in this direction arises in base-collectorjunctions 449 a and 449 b. After the complete depletion of thecollector, the maximum electric field is not increased by theapplication of a voltage. The maximum potential of a depletion region isprecisely observed at the central part of the depleted collector 450and, consequently, equals a zero electric field in that direction, asillustrated in FIG. 42D. The rest of the applied collector-base voltageis divided in lateral directions with respect to the intrinsic baselayer-collector junction. As a result, the voltage serves as an electricfield in that direction in an upper portion of a drift region 445.

The length of the drift region is defined by a depletion region edge 448and can be controlled by mask design and collector doping profiles.Accordingly, after electrons are induced by the electric field to causea current 446 to flow toward the central part of the transistor, thecurrent turns toward the collector contact region 437. In addition,carriers are confined in a low electric field region having a lowprobability of impact ionization due to a two-dimensional effect. Inthis way, it is possible to form a transistor having a high breakdownvoltage. Furthermore, the extrinsic base layers 416 of the two opposingtransistors coalesce with each other at the top of the structurethereof. Thus, it is possible to make the region of the extrinsic baselayer 416 smaller.

The effect of collector charge division, in combination with the effectof the region of an extrinsic base layer 416-collector junction beingmade smaller, causes collector-base capacitance to decrease, therebymaking this device suitable for low-power and smart-power applications.The maximum electric field developed across a range from the intrinsicbase layer to the collector contact region depends not only on anapplied voltage but on a distance 453 between the two bases.Accordingly, as the result of the intrinsic base layer beingelectrostatically shielded, thereby significantly suppressing base widthmodulation, an Early voltage has a high value. By this effect, it ispossible to prevent collector-emitter punch-though from occurring withinthe base. This means that base doping profile can be positivelydownscaled.

This structure can be formed not only on an SOI wafer but also on a bulksilicon wafer. In a bulk silicon transistor, an insulating collector isformed so as to be opposite in polarity to that of a pn junction. Anelectric field at the junction consumes some of collector charges formaintaining the depletion of the n-hill layer or of a lower portionthereof. The doping profile of the collector contact region needs to beadjusted so that the collector is completely depleted at the time ofnormal operation. The lower portion of the collector can be depleted bylikewise applying a reverse voltage to substrate electrodes.

In a transistor formed on an SOI wafer, a buried oxide isolates acollector from an Si substrate, thus causing the collector to beconfined between two intrinsic base layers in the course of nature. Aprocess of a double-emitter HCBT structure requires one time ofadditional implantation, compared with a standard bipolar-type andBiCMOS HCBT technology to form the intrinsic base layer 427 on anopposite side of the n-hill layer 412. The effect of collector chargedivision is controlled by mask dimensions.

Any lithography steps to be added to existing techniques are not neededin forming transistors. This means that the double-emitter HCBT can beintegrated with a standard HCBT device without having to furthercomplicating a process.

II: Masks

Now, a double-emitter structure based on HCBT technology will bedescribed. This structure can also be formed on a bulk or SOI waferusing other techniques. Both NPN-type and PNP-type bipolar devices canbe formed. Two intrinsic base layer-collector junctions opposing to eachother having opposite orientations are needed along with a collectorintegrated at a central part of the structure. In this geometricalarrangement, charges of the collector can be shared by the two intrinsicbase layers. This structure is suitable for the integration of devicesincluding a CMOS, though also realizable in technology dealing withbipolar-type devices only.

Some steps of a CMOS process are necessary for an HCBT structure inBiCMOS technology. In this case, these steps need to be used to formbipolar transistors only. Descriptions given in the present inventionwith regard to a double-emitter HCBT are based on a BiCMOS process flow.Although the process flow of an NPN-type transistor will be describedhere, a PNP-type transistor can also be formed using the same technicalconcept by reversing the type of dopant doped in a transistor region.FIG. 43 illustrates a typical set of masks used for the double-emitterHCBT.

Although it is possible to incorporate an HCBT into a CMOS processrequiring a smaller number of masks, integration of the HCBT with theCMOS generally requires three additional masks illustrated in FIG. 43(masks 402, 403 and 404 a). FIG. 43B illustrates masks already availablein a CMOS process flow and used for the double-emitter HCBT. FIG. 43Cillustrates masks used when a polysilicon electrode is sued for acollector.

III: Manufacturing Process

The double-emitter HCBT structure is in general processed in the sameway as the Si substrate 411 in which a p-type CMOS is formed. A firststep of the process is forming a standard shallow trench isolation(STI). An active region of the HCBT to serve as a collector contactregion is formed on a silicon column surrounded by the STI and on ann-hill layer 412, and is defined by an active mask 401.

A portion of the active mask 401 whereby a collector contact region isformed is angled to some degree, as illustrated in FIG. 43A, in order toreduce collector resistance. The ends of the active mask 401 may be leftflat, as illustrated in FIG. 43C.

After the formation of the STI, a continuous series of CMOS ionimplantation steps is performed, including ion implantation for theprevention of punch-through, ion implantation for threshold voltageadjustment, and ion implantation in wells. A combination of some ofthese ion implantation steps can be used to obtain doping profiles ofthe n-hill layer (collector contact region) of the HCBT.

In this case, CMOS lithography can be used for the mask 402 for the ionimplantation of the n-hill layer. More generally, the n-hill layer canbe ion-implanted using a process other than those added to the CMOSprocess, the ion implantation mask 402 illustrated in FIG. 43A isnecessary for the added process. This is the first additional mask whichhas become necessary for the HCBT structure. However, no matter whetherthe CMOS mask or the added HCBT mask is used, the dimensions of thesemasks are the same.

As the result of the ion implantation of the n-hill layer, there isobtained a doping profile of the n-hill layer optimum for HCBToperation. In order to obtain a desirable profile of the n-hill layer,it is possible to combine several ion implantation steps.

Ion implantation 413 a in the HCBT collector is illustrated in FIG. 44A.After well ion implantation in a CMOS process step, a photoresist 414 isremoved, a silicon crystal structure is restored, and high-temperatureannealing for electrically activating ion-implanted ionic species iscarried out. The ion implantation of the n-hill layer 412 of the HCBT isperformed immediately before or after the ion implantation of CMOS wellsis performed. Therefore, an annealing step in CMOS process steps canlikewise be used to restore the crystal of the n-hill layer and activatethe dopant thereof.

In a usual CMOS process flow, the well ion implantation is followed bythe formation of a gate stack and the ion implantation of a source/drainextension region. At this point in the CMOS process steps, the secondlithography mask 403 is needed for the HCBT structure.

This mask is used for base ion implantation 415 a performed to obtain ap-type extrinsic base layer 416. During this ion implantation step, aCMOS portion of a chip is covered with a photoresist 417, as illustratedin FIGS. 44B and 44C. The photoresist 417 extends over the active mask401, as illustrated in FIG. 44C, so that the left- and right-sideportions of the active region are thereby protected.

A collector-n+ contact region is ion-implanted in the protected portionsthereof, and a distance to the extrinsic base layer determinesbase-collector and collector-emitter breakdown voltages. In a CMOSformation step, a source/drain extension region is treated byhigh-temperature annealing after ion implantation. This step can be usedfor annealing performed to restore the crystal of the extrinsic baselayer and activate ionic species.

Alternatively, the ion-implanted extrinsic base layer 416 can beannealed separately using an added annealing step. This is because thesource/drain regions have not yet been ion-implanted at this point, sothe annealing step does not exert any significant effects on CMOScharacteristics. After the annealing of CMOS source/drain extensions,the etching mask 404 a for a device isolating oxide film is needed as athird additional mask. The CMOS structure is entirely covered with aphotoresist 418, and an emitter window 419 of the HCBT is opened, asillustrated in FIG. 44D.

At this point of the process, additional collector ion implantation 413b can be performed on the collector region 423. This ion implantation isnot essential to transistor operation, however, and may therefore beavoided. By performing this ion implantation, an even higher collectorimplantation density can be obtained in a region determined by masksillustrated in FIGS. 44D and 44E.

In such a way as described above, the high-frequency performance of atransistor has been improved. In addition, the uniformity of an electricfield distribution of the base-collector junction has been achieved. Thedevice isolating oxide film 420 is etched for a predetermined period oftime using these masks, as illustrated in FIG. 44F. To this end, wet ordry etching is used. The etching time is determined depending on to whatdegree a side surface 421 of the n-hill layer 412 is to be exposed. Theetching of the device isolating oxide film 420 can also be used todetermine the contact region of the collector for which polysilicon isused.

In this case, a device isolating etching mask pattern 404 b illustratedin FIG. 43C has to be used to determine the collector polysiliconregion. After the device isolating etching, a thin screening oxide film422 is deposited.

Next, using the second HCBT mask 403, the ion implantations 426 a and426 b are performed at two angles inclined in directions opposite toeach other, as illustrated in FIG. 44G. A p-type intrinsic base layer427 is obtained on a side surface of the n-hill layer 412. A crosssection defined by the plane 451 shown in FIG. 42B after the ionimplantation of the intrinsic base is illustrated in FIG. 44H as a shapein which the intrinsic base layer 427 is projected onto a side surfaceof the active region. The ion implantations 426 a and 426 b of theintrinsic base layer 427 are performed on the inside and outside of aplane illustrated in FIG. 44H.

The ion implantation of the intrinsic base layer 427 on opposing sidesurfaces is the only step added to a fundamental HCBT structure toobtain the double-emitter HCBT structure. Accordingly, both HCBTs can bemanufactured simultaneously using the same process.

In HCBT lithography based on the device isolating mask 404 a used fordevice isolating etching, the mask 404 a can be inclined with respect tothe mask 401 for the active region, as illustrated in FIG. 43C, in orderto form an oxide film in contact with the n-hill layer so as to beextremely thin. Consequently, ions implanted in the base can partiallypenetrate through the thin oxide film distributed in a stepwise manneraround the emitter window. This method increases the concentration of abase doping material around the emitter, and makes it possible toeventually prevent collector-emitter punch-through. In addition,extending the drift region 445 laterally further is desired from theviewpoint of improvements toward high breakdown voltages.

After the ion implantation of the intrinsic base layer 427, thephotoresist 425 has to be removed and the thin screening oxide film 422is etched. After the etching of the thin screening oxide film 422, asilicon surface of the sidewall of the n-hill layer 412 is exposed. Thissurface is treated by thermal annealing to form an ultrathin oxide film428.

This treatment prevents polysilicon from being epitaxially crystallizedduring the deposition thereof. Thus, the ultrathin oxide film 428 servesas a protective film of surfaces of the n-hill layer 412 duringpolysilicon etching. Next, a polysilicon layer 429 is deposited asillustrated in FIG. 44I. After the deposition, the polysilicon is etchedback, thereby obtaining an emitter polysilicon region 432 to be used asan emitter electrode (FIG. 44J). If the collector contact is to be madeof polysilicon, collector polysilicon is formed in the same way.

In order to reduce a depression 434 in the emitter polysilicon region432, a different planarization technique can be used. For example, it ispossible to use a CMOS dummy gate formed in the vicinity of an emittersidewall using a dummy gate mask 408, as illustrated in FIG. 43B. Thisis the same method as used in the above-described third embodiment.

Tetramethylammonium hydroxide (TMAH) solution-based etching, for itshigh selectivity against oxides, is used to etch back polysilicon. Thethin oxide film 428 grown on a surface of the n-hill layer at the timeof pre-deposition surface treatment can fully stop TMAH etching andperfectly protect the n-hill layer. Basically, the height 433 of anactive transistor (FIG. 44J) is determined at the end of the TMAH etchback of polysilicon, and additional process steps needed for the HCBTend. After this, the HCBT structure is completed using CMOS processsteps.

Hence, CMOS steps which affect the HCBT structure will be described. Ingeneral, the next CMOS process module is the formation of a gate spacer.To this end, an oxide film is deposited and etched back by anisotropictreatment. A spacer 435 of an oxide film is left on a sidewall of a CMOSgate. Due to the nature of this treatment, the same spacers 435 areformed in an emitter polysilicon region 432 on sidewalls of the n-hilllayer 412, as illustrated in FIG. 44K.

After that, source/drain ion implantation is performed on the CMOSstructure. The ion implantation 436 of the n+ source/drain regions of annMOS transistor can be used for the heavily-doped n+ collector contactregion 437 of the HCBT structure, as illustrated in FIG. 44L. In thiscase, polysilicon is not used for the collector. Thus, the etching mask404 b for a device isolating oxide film illustrated in FIG. 43C is nolonger necessary.

The positions of the ends of the photoresist 438 fixed by the n+ ionimplantation mask 405 determine a distance between an n+ collector andan extrinsic base layer. This distance affects transistorcharacteristics, such as collector-base and collector-emitter breakdownvoltages. In addition, the distance determines the drift region 445,illustrated in FIG. 42C, which determines a collector-emitter voltagedrop. Varying the distance changes the length of the drift region 445.Thus, it is possible to adjust the collector-emitter breakdown voltagein the same way as the transition time of a collector-base depletionregion which affects fT and fmax.

The other end of the collector n+ region is determined by a sidewall ofthe n-hill layer. If the collector is connected through polysilicon, adistance between the extrinsic base layer and the collector polysilicondetermines a drift region crucial to transistor performance.

Annealing for activating ions implanted into the source/drain of theCMOS can also be used to activate an ion-implanted region of the HCBT.This annealing can also be used for the purpose of diffusing a dopantfrom an n-type doped emitter polysilicon region 432 formed in contactwith a sidewall of the n-hill layer 412. This diffusion is generallycalled drive-in diffusion. In this way, an emitter n+ region 439 isformed in the intrinsic base layer 427 (illustrated in FIG. 44M).

A doping profile of the intrinsic base layer 427 is formed using such aprocess as described above. A horizontal cross section defined by theplane 451 illustrated in FIG. 42B is illustrated in FIG. 44N along withthe formed emitter n+ region 439.

The next CMOS process module is the formation of a silicide. First, anoxide film 440 to be used as a silicide protection film is deposited.Next, some CMOS parts are opened and some elements or regions areprotected by a photoresist 441 by using a silicide blocking mask.

In the HCBT structure, an oxide film 440 between the collector contactregion 437 and the extrinsic base layer 416 has to be partiallyprotected by the silicidation blocking masks 406 a and 406 b illustratedin FIG. 43B. However, as illustrated in FIG. 44N, the rest of thestructure is made open. The remaining oxide film 440 prevents thecollector contact region 437 and the extrinsic base layer 416 fromelectrically short-circuiting to each other.

A silicide 442 is formed using a standard method heretofore known in thesemiconductor industry as a silicidation method, as illustrated in FIGS.44O and 44P. The extrinsic base layer 416 and emitter polysilicon region432 of the n-hill layer 412 are segregated from each other by the spacer435 on a side surface of the n-hill layer 412, as illustrated in FIG.440. In this case, a silicide protection mask is composed only of theportion 406 a.

On the other hand, the emitter polysilicon region 432 and the extrinsicbase layer 416 can be segregated from each other by an oxide film lefttherebetween, by using the portion 406 b of the silicide protectionmask. In this case, the silicide protection mask is composed of theportions 406 a and 406 b.

In a back-end step of a process, an oxide film 443 is deposited, acontact hole 444 is etched and filled with low-resistance metal, andmetallization is carried out using a standard method. An ultimatedouble-emitter HCBT structure, as illustrated in FIG. 44Q, have a singlelayer of metal. A final device structure as shown by a cross sectiondefined by the plane 451 of FIG. 42B is illustrated in FIG. 44R.

A cross section of a polysilicon collector contact structure isillustrated in FIG. 44S. The size of the upper surface of the n-hilllayer 412 is denoted by reference numeral 490 in FIG. 44Q. The size 490(width of an active region) is, for example, 0.5 μm. In addition, thesize of the upper surface of the n-hill layer 412 is denoted byreference numeral 491 in FIG. 44R. The size 491 is, for example, 2.0 μm.

IV: Electrical Characteristics

For a double-emitter HCBT structure and a single-emitter HCBT structure,FIG. 45 illustrates the dependence of a base current (IB) and acollector current (IC) on a base-emitter voltage (VBE). This graph isalso called Gummel plot. FIG. 46 illustrates output characteristicscommon to the double-emitter HCBT structure and the single-emitter HCBTstructure.

A significant improvement has been made in the double-emitter structurewith regard to the breakdown voltage (BVCEO) of the HCBT structurehaving a common emitter. Both transistors are formed using the same setof masks and the same process parameters. The BVCEO can be increased byusing a double-emitter configuration. This can be realized by the designof lithography masks.

FIG. 47 illustrates a relationship among the maximum oscillationfrequency (fmax), cutoff frequency (fT) and collector current (IC) ofthe double-emitter and single-emitter HCBT structures. It is understoodthat the double-emitter HCBT shows lower values of fT and fmax and has apeak at a lower value of IC. This is ascribable to an increase incurrent density in the collector contact region. A current flowing in abase-collector depletion region is led toward the central part of theregion by an electric field, and then led toward the collector contactregion. Consequently, the collector current density at the central partof the collector rises, and a base width begins to increase at a lowvalue of the collector current (that is, Kirk effect), as illustrated inFIG. 47. In addition, electrons are forced to move within the enlargeddepletion region, thus causing related time constants to increase. Byvarying an emitter width, it is possible to reduce both the currentdensity and the time taken by electrons to move through thebase-collector depletion region.

In addition, the above-described bipolar transistor can be formed on thesame Si substrate on which the CMOS transistor is formed. FIG. 48 is aview illustrating a bipolar transistor and a CMOS transistor integratedon a substrate. In the CMOS transistor of FIG. 48, reference numeral 480denotes a source diffusion layer of the CMOS transistor and referencenumeral 481 denotes a drain diffusion layer thereof.

In particular, reference numeral 482 denotes the gate electrode of theCMOS transistor and reference numeral 483 denotes the spacer thereof.The spacer 483 is formed along with the spacer 435 of the bipolartransistor.

EXPERIMENTAL EXAMPLE

Specific conditions of each process described above are as shown below.The conditions of the ion implantation methods illustrated in FIGS. 44Ato 44J are as follows:

-   Extrinsic base layer (416 in FIG. 44B)

Approximately 5×10¹⁹-5×10²⁰ cm⁻³

-   Intrinsic base layer (427 in FIG. 44G)

Approximately 1×10¹⁸-5×10¹⁸ cm⁻³

-   Collector (n-hill layer) (412 in FIG. 44A)

Approximately 1×10¹⁶-5×10¹⁷ cm⁻³

The ratio in impurity concentration between the extrinsic base layer andthe collector is within the range from 10:1 to 10000:1.

Ion Implantation Conditions

-   Extrinsic base layer implantation (415 a)-   Impurity: BF₂+-   Doping concentration: 1.5×10¹⁵ cm⁻²-   Energy: 18 keV-   Intrinsic base layer implantation (426 a, 426 b)-   Impurity: BF₂+-   Doping concentration: 5.0×10¹³ cm⁻²-   Energy: 30 keV-   Inclination: 30°-   Collector implantation (413 a)-   Impurity: P+-   Doping concentration: 3.0×10¹² cm⁻²-   Energy: 220 keV-   Doping concentration: 2.0×10¹² cm⁻²-   Energy: 110 keV-   Doping concentration: 5.0×10¹¹ cm⁻²-   Energy: 30 keV-   Additional collector implantation (413 b)-   Impurity: P+-   Doping concentration: 5.0×10¹² cm⁻²-   Energy: 110 keV

In the present experimental example, it is possible to form asemiconductor element having an n-hill layer which is completelydepleted on these conditions and on the condition that the width of then-hill layer (width of an active region) is smaller than 500 nanometers.

1. A semiconductor device in which a lateral bipolar transistor and aCMOS transistor are hybrid-integrated, the lateral bipolar transistorincluding: an open region opened in a device isolating oxide filmsurrounding an active region; a polysilicon film formed on the openregion; and a protective film covering at least a part of a peripheralsurface of the active region exposed by opening the open region in thedevice isolating oxide film, wherein the polysilicon film has such athickness as to expose the active region out of the polysilicon film,and the protective film is a film for preventing the active region frombeing etched when the polysilicon film is etched to the thickness.
 2. Asemiconductor device in which a lateral bipolar transistor and a CMOStransistor are hybrid-integrated, the lateral bipolar transistorincluding: an open region opened in a device isolating oxide filmsurrounding an active region; a polysilicon film formed on the openregion; a protective film covering at least part of a peripheral surfaceof the active region exposed by opening the open region in the deviceisolating oxide film; a collector diffusion layer formed in the activeregion; and a collector electrode directly connected to the collectordiffusion layer region, wherein the polysilicon film has such athickness as to expose the active region out of the polysilicon film,and the protective film is a film for preventing the active region frombeing etched when the polysilicon film is etched to the thickness.
 3. Asemiconductor device comprising a lateral bipolar transistor, thelateral bipolar transistor including: a substrate including a firstconductive layer; an active region located on the first conductive layerand having such a shape as to protrude from the first conductive layerand have an upper surface and at least one side surface in contact withthe upper surface; an open region opened in a device isolating oxidefilm surrounding the active region; a polysilicon film formed on theopen region; an emitter region solid-phase diffused from the polysiliconfilm; and a dummy gate polysilicon formed in the device isolating oxidefilm, wherein the shape of the emitter region solid-phase diffused fromthe polysilicon film is controlled by the dummy gate polysilicon.
 4. Asemiconductor device comprising a lateral bipolar transistor, thelateral bipolar transistor including: a substrate including a firstconductive layer; an active region located on the first conductive layerand having such a shape as to protrude from the first conductive layerand have an upper surface and at least one side surface in contact withthe upper surface; and a device isolating oxide film partially coveringthe side surface of the active region, wherein the active regionincludes a second conductive layer having a polarity different from thatof the first conductive layer, and wherein the active region includes athird conductive layer having the same polarity as that of the firstconductive layer at two opposing positions of the upper surface and saidat least one side surface, wherein the third conductive layer includes afourth conductive layer having the same polarity as that of the secondconductive layer, wherein the fourth conductive layer is connected to anemitter electrode, further comprising a contact electrode, wherein theactive region is electrically connected to the contact electrode, andfurther comprising at least two contact electrodes, wherein the activeregion is electrically connected to the contact electrodes, and said atleast two contact electrodes are arranged in such a manner that a lineconnecting the contact electrodes is substantially orthogonal to anotherline connecting said two opposing positions of said at least one sidesurface. 5-8. (canceled)
 9. The semiconductor device according to claim4, wherein the impurity concentration and a width of the active regionare set so that the entire of the active region becomes depleted whenthe lateral bipolar transistor is electrically enabled.
 10. Thesemiconductor device according to claim 9, wherein a ratio between theimpurity concentration of the active region and the impurityconcentration of the third conductive layer is within a range from 1:10to 1:10000.
 11. The semiconductor device according to any one of claims3, 4, 9, and 10, further comprising a CMOS transistor integrated on thesubstrate.
 12. A method for manufacturing a semiconductor device inwhich a lateral bipolar transistor and a CMOS transistor arehybrid-integrated, the method comprising the steps of: forming anextrinsic base region for externally connecting a base region of anactive region of the lateral bipolar transistor, following a step of atleast one time of ion implantation in which an impurity is implantedwith the gate electrode of the CMOS transistor used as a mask; formingan open region around the active region by removing a predeterminedportion of the device isolating oxide film surrounding the activeregion; forming an intrinsic base region of the lateral bipolartransistor by implanting ions in a region of a side surface of theactive region exposed by the formation of the open region partiallyoverlapping with the extrinsic base region; forming a protective filmfor protecting the active region during etching in a subsequent step ona surface of the active region; forming an impurity-containingpolysilicon film in a region including the active region in which theprotective film is formed and the open region in the protective filmformation step; etching away the polysilicon film by a predeterminedthickness; and forming an emitter diffusion layer region and a collectordiffusion layer region by solid-phase diffusing an impurity from theimpurity-containing polysilicon film left after etching in thepolysilicon etching step.
 13. The method for manufacturing asemiconductor device according to claim 12, wherein the protective filmis an oxide film having such a thickness as to prevent the active regionof the lateral bipolar transistor from being etched in the polysiliconetching step.
 14. A method for manufacturing a semiconductor device inwhich a lateral bipolar transistor and a CMOS transistor arehybrid-integrated, the method comprising the steps of: forming anextrinsic base region for externally connecting a base region of anactive region of the lateral bipolar transistor, following a step of atleast one time of conductive film formation in which an impurity isimplanted with the gate electrode of the CMOS transistor used as a mask;forming an open region around the active region by removing apredetermined portion of the device isolating oxide film surrounding theactive region; forming an intrinsic base region of the lateral bipolartransistor by implanting ions in a region of a side surface of theactive region exposed by the formation of the open region partiallyoverlapping with the extrinsic base region; forming a protective filmfor protecting the active region during etching in a subsequent step ona surface of the active region; forming an impurity-containingpolysilicon film in a region including the active region in which theprotective film is formed and the open region in the protective filmformation step; etching away the polysilicon film by a predeterminedthickness; forming an emitter diffusion layer region by solid-phasediffusing an impurity from the impurity-containing polysilicon film leftafter etching in the polysilicon etching step; forming a collectordiffusion region in the active layer; and forming an electrode directlyconnected to the collector diffusion layer region.
 15. The method formanufacturing a semiconductor device according to claim 14, wherein theprotective film is an oxide film having such a thickness as to preventthe active region of the lateral bipolar transistor from being etched inthe polysilicon etching step.
 16. A method for manufacturing asemiconductor device including a lateral bipolar transistor, wherein astep of manufacturing the lateral bipolar transistor includes the stepsof: forming an active region having such a shape as to protrude from afirst conductive layer and have an upper surface and at least one sidesurface in contact with the upper surface on the first conductive layerserving as a substrate; opening an open region in the device isolatingoxide film surrounding the active region; forming a polysilicon film onthe open region; forming an emitter region by solid-phase diffusing theemitter region from the polysilicon film; and forming a dummy gatepolysilicon in the device isolating oxide film, and the shape of theemitter region solid-phase diffused from the polysilicon film iscontrolled by the dummy gate polysilicon.